Metrology data
Quality check
optical_metrology_check 2020-11-25-epix10kaquad3-mec-metrology.txt
X-Y quality check for optical metrology measurements ---------------------------------------------------------------------------------------------------------------------------- segm: S1 S2 dS1 dS2 L1 L2 dL1 dL2 angle(deg) D1 D2 dD d(dS) d(dL) ---------------------------------------------------------------------------------------------------------------------------- segm: 0 38012 38009 -403 -406 40997 40997 375 375 -0.56529 55909 55909 0 3 0 segm: 1 38010 38015 -94 -89 41012 41014 86 88 -0.12783 55921 55918 3 -5 -2 segm: 2 37990 37995 -21 -16 40990 40987 13 10 -0.02586 55884 55892 -8 -5 3 segm: 3 37991 37991 -84 -84 40995 40990 72 67 -0.11741 55884 55896 -11 0 5 ---------------------------------------------------------------------------------------------------------------------------- Z quality check for optical metrology measurements ----------------------------------------------------------------------------------------------------------------------------------------- segm: SA LA XSize YSize dZS1 dZS2 dZL1 dZL2 dZSA dZLA ddZS ddZL dZX dZY angXZ(deg) angYZ(deg) dz3(um) ----------------------------------------------------------------------------------------------------------------------------------------- segm: 0 38010 40997 40997 38010 0 -12 26 14 -6 20 12 12 20 -6 0.02795 -0.00904 -12.000 segm: 1 38012 41013 41013 38012 -74 -63 64 75 -68 69 -11 -11 69 -68 0.09709 -0.10325 11.007 segm: 2 37992 40988 40988 37992 -15 -21 113 107 -18 110 6 6 110 -18 0.15376 -0.02715 -5.990 segm: 3 37991 40992 40992 37991 118 104 202 188 111 195 14 14 195 111 0.27255 0.16740 -13.975 -----------------------------------------------------------------------------------------------------------------------------------------
Geometry file
- /reg/g/psdm/detector/alignment/epix10kaquad/2020-11-25-epix10kaquad3-mec/2020-11-25-epix10kaquad3-mec-geometry.txt
Validation on data
References
Overview
Content Tools