Metrology data

Quality check

optical_metrology_check 2020-11-25-epix10kaquad3-mec-metrology.txt


X-Y quality check for optical metrology measurements 
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segm:        S1      S2     dS1     dS2        L1      L2     dL1     dL2    angle(deg)   D1      D2      dD   d(dS)   d(dL)
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segm: 0   38012   38009    -403    -406     40997   40997     375     375   -0.56529   55909   55909       0       3       0
segm: 1   38010   38015     -94     -89     41012   41014      86      88   -0.12783   55921   55918       3      -5      -2
segm: 2   37990   37995     -21     -16     40990   40987      13      10   -0.02586   55884   55892      -8      -5       3
segm: 3   37991   37991     -84     -84     40995   40990      72      67   -0.11741   55884   55896     -11       0       5
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Z quality check for optical metrology measurements 
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segm:        SA      LA   XSize   YSize    dZS1  dZS2  dZL1  dZL2    dZSA  dZLA  ddZS  ddZL     dZX   dZY   angXZ(deg) angYZ(deg) dz3(um)
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segm: 0   38010   40997   40997   38010       0   -12    26    14      -6    20    12    12      20    -6   0.02795   -0.00904    -12.000
segm: 1   38012   41013   41013   38012     -74   -63    64    75     -68    69   -11   -11      69   -68   0.09709   -0.10325     11.007
segm: 2   37992   40988   40988   37992     -15   -21   113   107     -18   110     6     6     110   -18   0.15376   -0.02715     -5.990
segm: 3   37991   40992   40992   37991     118   104   202   188     111   195    14    14     195   111   0.27255    0.16740    -13.975
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Geometry file

  • /reg/g/psdm/detector/alignment/epix10kaquad/2020-11-25-epix10kaquad3-mec/2020-11-25-epix10kaquad3-mec-geometry.txt

Validation on data

References


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