Metrology data

Chris Kenney:  metrology file for MEC Quad-1 detector. Standard orientation.

New metrology was needed as one module was swapped. 

Quality check

optical_metrology_check 2021-01-27-epix10kaquad1-mec-metrology.txt

X-Y quality check for optical metrology measurements 
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segm:        S1      S2     dS1     dS2        L1      L2     dL1     dL2    angle(deg)   D1      D2      dD   d(dS)   d(dL)
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segm: 0   38003   38004      -8      -7     40992   41011       0      19   -0.01048   55907   55903       3      -1     -19
segm: 1   38001   38006      85      90     41000   40994     -77     -83    0.12229   55902   55901       1      -5       6
segm: 2   38004   38006     161     163     40998   40996    -149    -151    0.22640   55903   55903       0      -2       2
segm: 3   37998   38002     304     308     40988   41003    -284    -269    0.42766   55905   55894      10      -4     -15
----------------------------------------------------------------------------------------------------------------------------


Z quality check for optical metrology measurements 
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segm:        SA      LA   XSize   YSize    dZS1  dZS2  dZL1  dZL2    dZSA  dZLA  ddZS  ddZL     dZX   dZY   angXZ(deg) angYZ(deg) dz3(um)
-----------------------------------------------------------------------------------------------------------------------------------------
segm: 0   38003   41001   41001   38003     -13   -33     9   -11     -23    -1    20    20      -1   -23  -0.00140   -0.03468    -20.004
segm: 1   38003   40997   40997   38003    -109  -118    37    28    -113    32     9     9      32  -113   0.04542   -0.17112     -8.980
segm: 2   38005   40997   40997   38005     -78  -108    14   -16     -93    -1    30    30      -1   -93  -0.00140   -0.14021    -29.995
segm: 3   38000   40995   40995   38000     -79   -68    50    61     -73    55   -11   -11      55   -73   0.07757   -0.11082     10.990
-----------------------------------------------------------------------------------------------------------------------------------------

Geometry file

  • command: optical_metrology_epix10ka2m -i 2021-01-27-epix10kaquad1-mec-metrology.txt -r3 -A0 -Z-100000 -o 2021-01-27-epix10kaquad1-mec-geometry.txt
  • geometry file: /reg/g/psdm/detector/alignment/epix10kaquad/2021-01-27-epix10kaquad1-mec/2021-01-27-epix10kaquad1-mec-geometry.txt

Validation on data

References









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