Metrology data
Quality check
optical_metrology_check 2020-11-20-epix10kaquad0-ued-metrology.txt
X-Y quality check for optical metrology measurements ---------------------------------------------------------------------------------------------------------------------------- segm: S1 S2 dS1 dS2 L1 L2 dL1 dL2 angle(deg) D1 D2 dD d(dS) d(dL) ---------------------------------------------------------------------------------------------------------------------------- segm: 0 36691 36689 -1 -3 39691 39649 48 6 -0.00289 54054 54017 36 2 42 segm: 1 36691 36692 59 60 39686 39690 -56 -52 0.08590 54050 54049 1 -1 -4 segm: 2 36693 36686 181 174 39689 39692 -163 -160 0.25623 54052 54049 3 7 -3 segm: 3 36692 36690 -184 -186 39691 39689 173 171 -0.26706 54052 54051 1 2 2 ---------------------------------------------------------------------------------------------------------------------------- Z quality check for optical metrology measurements ----------------------------------------------------------------------------------------------------------------------------------------- segm: SA LA XSize YSize dZS1 dZS2 dZL1 dZL2 dZSA dZLA ddZS ddZL dZX dZY angXZ(deg) angYZ(deg) dz3(um) ----------------------------------------------------------------------------------------------------------------------------------------- segm: 0 36690 39670 39670 36690 199 132 31 -36 165 -2 67 67 -2 165 -0.00361 0.25845 -66.955 segm: 1 36691 39688 39688 36691 -29 -82 -28 -81 -55 -54 53 53 -54 -55 -0.07868 -0.08667 -52.996 segm: 2 36689 39690 39690 36689 39 31 -42 -50 35 -46 8 8 -46 35 -0.06640 0.05466 -7.989 segm: 3 36691 39690 39690 36691 44 37 -182 -189 40 -185 7 7 -185 40 -0.26778 0.06324 -7.007 -----------------------------------------------------------------------------------------------------------------------------------------
References
Overview
Content Tools