Optical measurement

Old technique!

Is it old technique of measurement, individual for each quad.

2012-11-08 Run6 DSD CSPad metrology file from Chris Kenney:
2012-11-08-Run6-DSD-Metrology.xlsx
identically converted to the text format:
2012-11-08-Run6-DSD-Metrology.txt
Image for all quads:

QC procedure and results

We calculate
S1 - 1st short side length of 2x1
S2 - 2nd short side length of 2x1
L1 - 1st long side length of 2x1
L2 - 2nd long side length of 2x1
D1 - 1st diagonal of 2x1 between corners 1 and 3
D2 - 2nd diagonal of 2x1 between corners 2 and 4
dS and dL are the deviations of the 1st and 2nd corner along the short and long sides, respectively. The sign of all dS are chosen in order to provide correct sign for the tilt angle (the same direction for all 2x1 sensors).
<dS/L> - the tilt angle of 2x1 averaged over two sides in radians.
angle(deg) - the same angle in degrees.
dD = D1 - D2
d(dS) = dS1 - dS2
d(dL) = dL1 - dL2

Quality check parameters for the perfect measurement:

S1=S2, L1=L2 - the 2x1 sides should have equal length and width
dS1 = dS2 = 2*dL1 =2*dL2 - tilt angle should provide consistent deviation for all corners
dD=0, d(dS)=0, and d(dL)=0 - within precision of measurement.

Everything, excluding <dS/L> and angle(deg), are in micrometers.

pair:        S1      S2     dS1     dS2        L1      L2     dL1     dL2    <dS/L>  angle(deg)      D1      D2      dD   d(dS)   d(dL)

Quad  0
pair: 0   20900   20910      74      84     43540   43543     -46     -43    0.00181    0.10396   48294   48305     -11     -10      -3
pair: 1   20903   20912      97     106     43543   43531     -40     -52    0.00233    0.13358   48299   48294       5      -9      12
pair: 2   20909   20905    -227    -223     43543   43541    -108    -110   -0.00517   -0.29607   48301   48302      -1      -4       2
pair: 3   20915   20903    -201    -189     43541   43544     -93     -90   -0.00448   -0.25659   48304   48301       3     -12      -3
pair: 4   20983   20980    -422    -425     43698   43702     205     209   -0.00969   -0.55526   48481   48474       7       3      -4
pair: 5   20975   20977    -374    -372     43709   43703     184     178   -0.00853   -0.48898   48482   48478       4      -2       6
pair: 6   20911   20908     -83     -80     43536   43540     -37     -33   -0.00187   -0.10725   48302   48295       7      -3      -4
pair: 7   20910   20909     147     148     43539   43535      70      66    0.00339    0.19411   48295   48300      -5      -1       4

Quad  1
pair: 0   20906   20909     -39     -36     43536   43544       9      17   -0.00086   -0.04935   48295   48304      -9      -3      -8
pair: 1   20910   20896       1     -13     43544   43538       3      -3   -0.00014   -0.00790   48295   48301      -6      14       6
pair: 2   20978   20974     152     156     43707   43702      73      68    0.00352    0.20189   48474   48480      -6      -4       5
pair: 3   20981   20978      33      36     43703   43708      17      22    0.00079    0.04523   48482   48477       5      -3      -5
pair: 4   21385   21371    -109    -123     43905   43918      54      67   -0.00264   -0.15136   48842   48835       7      14     -13
pair: 5   21375   21377    -150    -148     43911   43924      65      78   -0.00339   -0.19439   48842   48844      -2      -2     -13
pair: 6   20902   20911      66      57     43542   43533      36      27    0.00141    0.08093   48298   48295       3       9       9
pair: 7   20914   20897     302     319     43537   43531     141     135    0.00713    0.40865   48284   48304     -20     -17       6

Quad  2
pair: 0   20915   20909    -231    -237     43541   43541     112     112   -0.00537   -0.30792   48302   48303      -1       6       0
pair: 1   20904   20905    -197    -196     43549   43549      92      92   -0.00451   -0.25853   48304   48309      -5      -1       0
pair: 2   20912   20905    -127    -120     43538   43536     -56     -58   -0.00284   -0.16253   48299   48295       4      -7       2
pair: 3   20911   20907     126     130     43543   43546      61      64    0.00294    0.16842   48305   48303       2      -4      -3
pair: 4   21380   21378     -62     -64     43916   43910      42      36   -0.00143   -0.08220   48848   48833      15       2       6
pair: 5   21378   21399     138     159     43910   43909     -78     -79    0.00338    0.19377   48836   48847     -11     -21       1
pair: 6   20901   20907     -89     -95     43562   43539     -27     -50   -0.00211   -0.12104   48312   48302      10       6      23
pair: 7   20906   20916     -35     -45     43545   43541     -14     -18   -0.00092   -0.05263   48306   48300       6      10       4

Quad  3
pair: 0   20914   20899    -115    -130     43532   43553      45      66   -0.00281   -0.16119   48298   48304      -6      15     -21
pair: 1   20909   20906     -19     -22     43549   43540      20      11   -0.00047   -0.02697   48308   48298      10       3       9
pair: 2   20904   20914     -51     -61     43544   43538     -30     -36   -0.00129   -0.07369   48295   48306     -11      10       6
pair: 3   20907   20925     -38     -56     43541   43543     -20     -18   -0.00108   -0.06185   48308   48301       7      18      -2
pair: 4   20910   20908       2       0     43537   43539       3       5    0.00002    0.00132   48302   48294       8       2      -2
pair: 5   20906   20906       4       4     43547   43552      -8      -3    0.00009    0.00526   48304   48310      -6       0      -5
pair: 6   21382   21384     210     208     43908   43911      99     102    0.00476    0.27272   48838   48840      -2       2      -3
pair: 7   21372   21383      95      84     43909   43911      44      46    0.00204    0.11678   48838   48836       2      11      -2


Comparing deviations of dS1 and dS2, and dL1 and dL2, we found:

  • All other measurements are consistent within +/-10um
  • Angles of 2x1 are in the range from -0.56 to +0.41 degree.
  • THIS IS THE MOST CAREFUL MEASUREMENT SO FAR, WHICH DOES NOT SHOW ANY PROBLEM IN THE QC.

Configuration parameters

(tick) center/0-end.data (pixel)

 197.84   197.86   311.21    98.70   627.36   629.63   710.97   498.82   
 198.37   198.07   310.14    97.09   624.27   625.14   710.74   497.85   
 199.71   198.51   308.93    96.20   625.32   625.15   713.14   500.65   
 198.61   198.16   309.66    97.33   627.60   627.85   714.06   501.72   
 
 307.96    95.54   626.89   628.45   512.15   724.70   196.99   197.12   
 307.48    95.09   625.34   625.39   511.31   724.05   197.25   196.30   
 306.79    94.19   624.28   624.35   510.14   722.53   196.41   197.17   
 307.73    95.02   627.16   627.64   512.44   725.03   195.67   195.34   
 
  -0.13    -0.12    -0.15     0.09    -0.50    -0.35    -0.57    -0.56   
  -0.15    -0.11    -0.20    -0.15    -0.28    -0.13    -0.34    -0.16   
  -0.18    -0.17    -0.13    -0.15    -0.50    -0.52    -0.43    -0.38   
   0.12    -0.03     0.13     0.27     0.05     0.16    -0.23    -0.22

(tick) tilt/0-end.data (degree)

 0.10396   0.13358  -0.29607  -0.25659  -0.55526  -0.48898  -0.10725   0.19411   
-0.04935  -0.00790   0.20189   0.04523  -0.15136  -0.19439   0.08093   0.40865   
-0.30792  -0.25853  -0.16253   0.16842  -0.08220   0.19377  -0.12104  -0.05263   
-0.16119  -0.02697  -0.07369  -0.06185   0.00132   0.00526   0.27272   0.11678

(minus) offset/0-end.data

  0    0  820  820
  0  820  820    0
  0    0    0    0

(minus) offset_corr/0-end.data

 0  0  0  0
 0  0  0  0
 0  0  0  0

(minus) marg_gap_shift/0-end.data

15  40   2  25
15  40   2  25
 0   0   0   0
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