Notes:

  • If on a PAMM - set camera to free run
  • Send a picture of each camera to the log book
  • After complete - reset all camera exposures, motor positions, flippers, etc
    • DTOTR2 can stay in the in position
    • DTOTR1 should be retracted in y direction (DTOTR1_Y=0)
    • LFOV motor should be moved out (to motor position 75)
    • CHER wafers should be driven out (hold CW until they are fully retracted, ~25s)
    • GAMMA2 screens should be out
    • EDC_screen should be out
CameraMotor positions for checkoutConditions/NotesReference Image

DTOTR2

CAMR:LI20:107


XPS:LI20:MC01:M7

XPS:LI20:MC01:M8




DTOTR_X = -46.5

DTOTR_Y = 144


DTOTR1 must be retracted:

DTOTR1_Y = 0

Exposure = 0.01s / Filter out

Dump table lights on

You should be able to see the damage on the YAG2 screen, and the upper/lower  edges of the holder should be sharp. The sides of the image will be out of focus since the screen is rotated 45degrees.

Note - Retract DTOTR1 or it will make a shadow on the DTOTR2 image

DTOTR1

CMOS:LI20:3505


XPS:LI20:MC01:M3

XPS:LI20:MC01:M4

XPS:LI20:MC01:M7

XPS:LI20:MC01:M8




DTOTR1_X = 24

DTOTR1_Y = 98

DTOTR_X/Y as above

Exposure = 0.1s / Filter out

Same as above. You should be able to see damage markings on YAG2. Move the DTOTR1_Y mover in 5mm steps to find features.

LFOV

CAMR:LI20:301


XPS:LI20:MC01:M6




LFOV = 150


Exposure = .001 / Filter = out

The stuff on the left is LBG_LFOV. Use LBG_LFOV motor to retract (to left)

GAMMA1

CAMR:LI20:302


XPS:LI20:MC01:M6




LFOV = 140

Exposure = .01s

Should be able to make out the grid pattern on the CsI array

GAMMA2

CAMR:LI20:303


XPS:LI20:MC02:M3

XPS:LI20:MC02:M6





Gamma2 Horz = 100

Gamma2 Vert = 0

Exposure = 0.001s



CHER

CAMR:LI20:308


PROF:LI20:3500

LI20 Profile monitor panel, select CENTER_CHERWAFER, Press and hold CCW until wafer is all the way in (~25s).

CW to retract (~25s)

Exposure = 0.03s / Filter out

You can't see many features, but you can see the whole wafers.

PRDMP

CAMR:LI20:108

n/a

Exposure = 0.02s

The thing on the left looks like it is in the way, but this is the out position. It looks closer the beam than it is because of parallax

EDC_SCREEN

CAMR:LI20:309


XPS:LI20:MC02:M7

XPS:LI20:MC03:M5




EDC Horz = 41

EDC Vert = 51

Exposure = 0.001s

Light in the EDC chamber should be on (From PDC/EDC power strip)




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