Upcoming plans (as of Feb 2024):

Parts ordered to transition to Epics control of the MFC:

From Newport: 

  1. Base Vacuum Gauge Controller, RS232 and RS485, Series 946, US Region
    MODEL: 946-US-NANANA-NA
    https://www.newport.com/p/946-US-NANANA-NA
  2. Control Card, Mass Flow Controller, Series 946 Controller
    MODEL: 20000712
    https://www.newport.com/p/20000712
    Lead time ~12 Weeks (Delivery in May/June)

From MKS:

  1. Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 50 ft. 
    PART: 100016746
    https://www.mks.com/p/100016746
    Lead time in ~9 wks (Delivery in May)


We have mass flow controller unit in hand, and are controlling it over ethernet now

Mass Flow Controller, 1000 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Metal Seal
PART: GM50A013103SMM020
https://www.mks.com/p/GM50A013103SMM020

To do list:

  • Find rack space for controller - mount above the power supply: FKG20-27
    • Update documentation? Who manages this?
  • Contact controls team about integrating into Epics
  • Installation and testing
  • Update Epics panels

More info:

Manual, pinout on page 73: https://www.mks.com/mam/celum/celum_assets/resources/946-100018121-MAN.pdf?1

Specs: https://www.mks.com/mam/celum/celum_assets/resources/946-DS.pdf?4

Dimensions: https://www.mks.com/mam/celum/celum_assets/resources/946-DIM.pdf?2




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