Preparation checklist
- All chamber doors must be closed
- All chamber flanges must be in place (no obvious opening)
- TC1:VGC:11, TC1:VGC:12, TC1-VGC-01, TC1-VGC-02, TC1-VGC-03, TC1-VGC-04 must be closed
- MEZ-PMF-01 EBARA A70, MEZ-PMF-02 EBARA A70 must be off (if faulted, press RESET)
- TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed
- MEZ-GPI-02 must display ~ 6.5e+02 torr (if lower, open MEZ:VGC:18 until restored, then close)
- TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed and allowed to open
Turbo pump startup procedure
- Open mechome, go the tab "User Devices", open the panel "User Sentry PDU"
- Turn On "Roughing pump PTM 02 (turbo 2)"
- after a while, scroll to turbo gate-valve (SEW-VGC-15) will switch to allowed to open. - Press OPN on SEW-VGC-15
- turbo status goes to "OK to Run" - Press RUN next to the turbo pump logo
- turbo status will go through "Accelerating" then "Full Speed" mode
The turbo pump subsystem is now ready for operation.
Pumping procedure
- Press OPN on TC1-VGC-04
- Press RUN on MEZ-PMF-01 EBARA A70
- Press OPN on MEZ:VGC:17 (wait a few seconds if MEZ:VGC:17 cannot open)
- Press RUN on MEZ-PMF-02 EBARA A70
- Press OPN on MEZ-VIC-19 (wait a few seconds if MEZ-VIC-19 cannot open)
Both Ebara pumps will start running in MAIN mode. On the striptool graph, the target chamber Pirani gauge value should drop rapidly. Once pre-pump Pirani gauges (MEZ-GPI-06 and MEZ-GPI-07) drop below 7.5e+00 torr, the Ebara pumps will start running in BOOSTER mode (typically after 10-15 minutes from startup). The primary vacuum procedure is finished when the target chamber Pirani gauge (MEC:TC1:GPI:01) drops below 5.0e-02 torr (typically after 30-40 minutes from startup).
If something goes off track during this procedure, initiate the venting procedure and check for leaks (flanges, virtual leaks, waterlines, etc).
Secondary vacuum
Prerequisites
- Turbo pump subsystem must be up and running as described above.
- Primary vacuum pumping procedure must have been completed.
- Target chamber Pirani gauge (MEC:TC1:GPI:01) must be below 5.0e-02 torr.
- On the striptool graph, the target chamber Pirani gauge curve should look asymptotic, meaning the primary vacuum subsystem has reached saturation.
Secondary vacuum pumping procedure
- Press OPN on TC1-VGC-02
- primary vacuum gate-valve will automatically close first, before turbo gate-valve opens → do not forget the primary vacuum shutdown procedure below
- target chamber Pirani gauge value should plummet, until it goes out of range and the target chamber cold-cathode gauge takes turn - Press STP on both Ebara pumps
- Press CLS on MEZ:VGC:17 and MEZ-VIC-19
- Press OPN on MEZ:VGC:18
- primary vacuum line will start venting
- wait until Pirani gauge MEZ-GPI-02 goes above ~ 6.5e+02 torr - Press CLS on MEZ:VGC:18
- primary vacuum venting valve should not stay open longer than ~ 5 minutes as it may heat up too much
The target chamber is now fully pumped down, ready to be exposed to the x-ray beamline through the beryllium window system.