Vacuum System Hardware

Interlocking and Monitoring Hardware

• Allen-Bradley ControlLogix 5000 Series
  • ControlLogix Family
  • 1756 ControlLogix I/O
  • 1794/1797 Flex I/O
  • Wiring Systems
  • ControlLogix Selection Guide (PDF)
  • ControlLogix Digital I/O Modules User Manual (PDF)
  • ControlLogix Analog I/O Modules User Manual (PDF)
  • ControlLogix Chassis Series B Installation Instructions (PDF)
  • Digital/Analog PLC Wiring Systems (PDF)
  • ControlLogix Controllers User Manual (PDF)
  • Logix5000 Controllers Design Considerations Reference Manual (PDF)
  • ControlNet Coax Media Planning and Installation Guide
  • ControlNet Modules in Logix5000 Control Systems
  • ControlNet Media System Component List
  • Logix5000 Controllers Common Procedures Programming Manual (PDF)
  • Logix5000 Controllers General Instructions Reference Manual (PDF)
  • Logix5000 Controllers System Reference (PDF)

Gate Valves

• VAT Series 48 (where RF shield is required)

• VAT Series 47 (where RF shield is not required)

• SLAC 233-808, VAT Valve Local Controller (J-Box)
  • SD-233-808-00 Schematic (PDF)

• SLAC 380-210, Allen-Bradley PLC Two Valve Valve Controller
  • SD-380-210-00 Schematic (PDF)

Gauges

• MKS 422 Cold Cathode Gauge
  • MKS Gauges for High Energy Physics (PDF)

• MKS 317 Ehnanced Convection Pirani
  • MKS Gauges for High Energy Physics (PDF)

• Helix / Granville-Phillips Bayard-Alpert Gauges
  • Gauge Info (pdf)

Gauge Controller

• MKS 937B (Newest)
  
  • 937B Gauge Controller Manual
  • 937B Firmware Upgrade
  • 937B Datasheet
• MKS / HPS 937A
  • 937A Gauge Controller
  • 937A Gauge Controller Manual
  • 937A Gauge Controller Serial Communications  
  • 937A Datasheet (pdf)
  • MKS Gauges for High Energy Physics (PDF)
• MKS / HPS 937 (Oldest model)
  • 937 Gauge Controller Manual
• MKS 943 Single Cold Cathode Gauge Controller
  (used as station gauges and main manifold locations)
  
  • 943 Cold Cathode Controller Manual (pdf)
  • 943 Datasheet

• Helix / Granville-Phillips 307
  • 307 Bayard-Alpert Gauges
  • 307 Datasheet (pdf)
  • 307 Instruction Manual (pdf)

Ion Pumps

• Noble Diode type pumps are recommended. Pumps must have StarCell connector.

• Varian Ion Pumps
  • Varian Ion Pumps
  • Ion Pump Catalog (PDF)

Ion Pump Controller

• Gamma Digitel Multiple Pump Controller
  • Digitel MPC

Turbo Pump Controller

• Varian Turbo Pump Controller
  • TPS-Compact
  • V81 Controller
  • V301 Controller
• Leybold/Oerlikon
  • Vacuum Fundamentals
  • Mag Pump Digital Specs
  • Mag Pump Digital Profibus Manual

Roughing and Backing Pumps

• Kashyama MU300
• Kashyama MU100
• Kashyama Wiring Diagram
• Kashyama Serial Protocal 

Residual Gas Analyzer

• MKS Microvision2 RGA 
  • Using Virtual RGA Systems SP104017.100
  • Microvision2 Hardware Manual - SP101015 102
  • Process Eye Professional v5 Recipe Wizard Manual SP104009.10 0
  • MV2_EV2 Getting Started Guide - SP106003 100
  • Process Eye Pro V5 7 User Manual - SP104021 102
  • ASCII Protocol User Manual SP1040016.102
  • Cpp Examples