Readiness checklist

• Hutch must be open
• Stand next to the target chamber (be ready to react once venting is completed to avoid over-pressurization)

Venting procedure

• Press INSERT GL in the BERYLLIUM WINDOW SYSTEM section (glass window triangle logo must be red)
• Check TC1-VGC-01, TC1-VGC-02, TC1-VGC-03, TC1-VGC-04, VGC-09 (gate valves leading to the target chamber)
• Press CLS on all open gate valves leading to the chamber (their triangle logos must all be red)
• Remove the 4 locks on one of the target chamber doors
• Press OPN on TC1:VGC:11 (the following window will open)
  
• Press Yes and close the window immediately (pay attention to the sound)
• Wait until you can hear the compressed dry air intake loudly
• Press CLS on TC1:VGC:11 immediately
• Open 1 or 2 target chamber doors, hook them open with the rubber string
• Allow some time to ventilate the chamber before doing anything inside the target chamber
• If you are not going to pump down again right away, please follow the Turbo pump shutdown procedure below

Turbo pump shutdown

• Turn the gas ballast control knob of the scroll pump to level I
• If you are going to pump down within the next hour, stop here, otherwise continue the procedure
• Press STP next to the turbo pump logo
• Allow at least 15-20 minutes for the turbo pump to spin down (the off-status logo does not mean the blades have stopped spinning)
• Press CLS on SEW-VGC-15
• If you are going to pump down within the next 12 hours, stop here, otherwise continue the procedure
• Turn the gas ballast control knob of the scroll pump to level 0
• Open mechome, go to the tab "User Devices", open the panel "User Sentry PDU"
• Turn On "Roughing pump PTM 02 (turbo 2)"

Version tracking