Follow the troubleshooting guide to attempt to restart the pump: DPS Pump Troubleshooting
If the roughing pump will not restart, then some component has likely suffered radiation damage and needs to be replaced. This guide will provide instructions for several of the hardware fixes undertaken so far.
For more assistance or for parts, contact the Ebara service technician: Steve Gapuz - email: sgapuz@ebaratech.com, or sales person: Keith Barnes - email: kbarnes@semitorrdist.com.
Remove shielding from around the pump
- Ensure the pump is stopped and the foreline valve closed.
- Remove the bricks from on top of the pump, noting where the bricks came from so you can replace them somewhat similarly.
- Remove the first layer of polyethylene shielding.
- Undo the KF flange clamp and foil both sides. Undo the connector to the valve and move the foreline to the side to somewhere safe and secure.
- Remove the second layer of polyethylene and aluminum plate,
Remove the cover from the pump
- Unplug the power cord and place it somewhere within site.
- Undo the ISO-80 flange and foil both sides. Set the conical adapter aside
- Remove the 4 screws surrounding the inlet port and remove the plates on either side of the port.
- Undo the screws on front and back end of the top cover (2 in total).
- There are more screws on the sides, but these should have been removed before the lead shielding was added.
- Lift the cover off.
Troubleshoot the YASKAWA V1000 units
- Plug the pump back in and power on.
- Wait for ~10 seconds for pump to initialize.
- Look at both of the V1000 units. If the ALM indicator is lit, then that unit has a problem and should be replaced.
- The photo below shows one faulty unit on the left, and a good unit on the right
