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Preparation checklist

  • All chamber doors must be closed
  • All chamber flanges must be in place (no obvious opening)
  • TC1:VGC:11, TC1:VGC:12, TC1-VGC-01, TC1-VGC-02, TC1-VGC-03, TC1-VGC-04 must be closed
  • MEZ-PMF-01 EBARA A70, MEZ-PMF-02 EBARA A70 must be off (if faulted, press RESET)
  • TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed
  • MEZ-GPI-02 must display ~ 6.5e+02 torr (if lower, open MEZ:VGC:18 until restored, then close)
  • TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed and allowed to open

Turbo pump startup procedure

  • Open mechome, go the tab "User Devices", open the panel "User Sentry PDU"
  • Turn On "Roughing pump PTM 02 (turbo 2)"
    - after a while, scroll to turbo gate-valve (SEW-VGC-15) will switch to allowed to open.
  • Press OPN on SEW-VGC-15
    - turbo status goes to "OK to Run"
  • Press RUN next to the turbo pump logo
    - turbo status will go through "Accelerating" then "Full Speed" mode

The turbo pump subsystem is now ready for operation.

Pumping procedure

  • Press OPN on TC1-VGC-04
  • Press RUN on MEZ-PMF-01 EBARA A70
  • Press OPN on MEZ:VGC:17 (wait a few seconds if MEZ:VGC:17 cannot open)
  • Press RUN on MEZ-PMF-02 EBARA A70
  • Press OPN on MEZ-VIC-19 (wait a few seconds if MEZ-VIC-19 cannot open)

Both Ebara pumps will start running in MAIN mode. On the striptool graph, the target chamber Pirani gauge value should drop rapidly. Once pre-pump Pirani gauges (MEZ-GPI-06 and MEZ-GPI-07) drop below 7.5e+00 torr, the Ebara pumps will start running in BOOSTER mode (typically after 10-15 minutes from startup). The primary vacuum procedure is finished when the target chamber Pirani gauge (MEC:TC1:GPI:01) drops below 5.0e-02 torr (typically after 30-40 minutes from startup).

If something goes off track during this procedure, initiate the venting procedure and check for leaks (flanges, virtual leaks, waterlines, etc).

Secondary vacuum

Prerequisites

  • Turbo pump subsystem must be up and running as described above.
  • Primary vacuum pumping procedure must have been completed.
  • Target chamber Pirani gauge (MEC:TC1:GPI:01) must be below 5.0e-02 torr.
  • On the striptool graph, the target chamber Pirani gauge curve should look asymptotic, meaning the primary vacuum subsystem has reached saturation.

Secondary vacuum pumping procedure

  • Press OPN on TC1-VGC-02
    - primary vacuum gate-valve will automatically close first, before turbo gate-valve opens → do not forget the primary vacuum shutdown procedure below
    - target chamber Pirani gauge value should plummet, until it goes out of range and the target chamber cold-cathode gauge takes turn
  • Press STP on both Ebara pumps
  • Press CLS on MEZ:VGC:17 and MEZ-VIC-19
  • Press OPN on MEZ:VGC:18
    - primary vacuum line will start venting
    - wait until Pirani gauge MEZ-GPI-02 goes above ~ 6.5e+02 torr
  • Press CLS on MEZ:VGC:18
    - primary vacuum venting valve should not stay open longer than ~ 5 minutes as it may heat up too much

The target chamber is now fully pumped down, ready to be exposed to the x-ray beamline through the beryllium window system.

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