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- Block the laser.
- Go to laser room and rotate an ND2 filter in the filter wheel in.
- Park e-beam.
Move the target mount into the field of view of the FrontView camera. This will be around
Motor position Target mount horizontal -120 mm Target mount vertical -20 mm - Flip front view blue glass filter IN (Beckhof → E:03 IN=IN )
- Release e-beam.
- Measure location of the beam. Write it down and use a line out. Don't take a new Beam mark.
- Park the e-beam
- Flip front view blue glass filter OUT
- Close laser iris
- Release the laser
- Use M1 to center hole on laser circle, use M2 to align to e-beam location
- Confirm alignment with electron beam
- park e-beam, block laser
Move axilens IN
Motor position Lens horizontal ~ 8.3 mm lens vertical ~ 8.05 mm - Unblock laser and confirm alignment to beam reference
Drive foil OUT
Motor position Target mount horizontal -150 mm Target mount vertical -20 mm - Go to laser room and take out ND2 filter from filter wheel.
- E-beam and laser con now be released.
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- Have gas jet gas delivery prepared (see procedure here)
- Park e-beam
Move gas jet below electron beam
Motor position Target mount horizontal ~ -146 mm Target mount vertical ~ -44 mm
Puff gas jet.
rep rate delay setting 5 Hz 26.7 ms
10 Hz 15.7 ms
- Set laser timing. References here
- Perform x/y with a2D scan or consecutive 1D scans and evalute plasma glow
Part 2 b : Fine-alignment with static fill
- Park e-beam
- Set static fill (see procedure here)
- Set laser timing. References here
- Perform x/y with a2D scan or consecutive 1D scans and evalute plasma glow
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