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- All chamber doors must be closed
- All chamber flanges must be in place (no obvious opening)
- TC1:VGC:11, TC1:VGC:12, TC1-VGC-01, TC1-VGC-02, TC1-VGC-03, TC1-VGC-04 must be closed
- MEZ-PMF-01 EBARA A70, MEZ-PMF-02 EBARA A70 must be off (if faulted, press RESET)
- TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed
- MEZ-GPI-02 must display ~ 6.5e+02 torr (if lower, open MEZ:VGC:18 until restored, then close)
- TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed and allowed to open
Turbo pump startup procedure
- Open mechome, go the tab "User Devices", open the panel "User Sentry PDU"
- Turn On "Roughing pump PTM 02 (turbo 2)"
- after a while, scroll to turbo gate-valve (SEW-VGC-15) will switch to allowed to open. - Press OPN on SEW-VGC-15
- turbo status goes to "OK to Run" - Press RUN next to the turbo pump logo
- turbo status will go through "Accelerating" then "Full Speed" mode
...
- Turbo pump should be at "Full Speed" (if not follow Turbo pump startup procedure below)
Pumping procedure
- Press OPN on TC1-VGC-04
- Press RUN on MEZ-PMF-01 EBARA A70
- Press OPN on MEZ:VGC:17 (wait a few seconds if MEZ:VGC:17 cannot open)
- Press RUN on MEZ-PMF-02 EBARA A70
- Press OPN on MEZ-VIC-19 (wait a few seconds if MEZ-VIC-19 cannot open)
...
- Wait until MEC:TC1:GPI:01
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If something goes off track during this procedure, initiate the venting procedure and check for leaks (flanges, virtual leaks, waterlines, etc).
Secondary vacuum
Prerequisites
- Turbo pump subsystem must be up and running as described above.
- Primary vacuum pumping procedure must have been completed.
- Target chamber Pirani gauge (MEC:TC1:GPI:01) must be below 5.0e-02 torr.
- On the striptool graph, the target chamber Pirani gauge curve should look asymptotic, meaning the primary vacuum subsystem has reached saturation.
Secondary vacuum pumping procedure
- drops below 5.0e-02 torr
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- Press OPN on TC1-VGC-02
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- Press CLS on MEZ:VGC:17
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- Press STP on MEZ-PMF-01 EBARA A70
- Press CLS on MEZ-VIC-19
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- Press STP on MEZ-PMF-02 EBARA A70
- Press OPN on MEZ:VGC:18
...
- Wait until MEZ-GPI-02
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- passes above ~ 6.5e+02 torr
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- Press CLS on MEZ:VGC:18
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The target chamber is now fully pumped down, ready to be exposed to the x-ray beamline through the beryllium window system.
If something goes off track during this procedure, initiate the venting procedure and check for leaks (flanges, virtual leaks, waterlines, etc).
Turbo pump startup procedure
- Open mechome, go to the tab "User Devices", open the panel "User Sentry PDU"
- Turn On "Roughing pump PTM 02 (turbo 2)"
- Wait until SEW:GPI:04 drops below 1.0e-02 torr
- Press OPN on SEW-VGC-15
- Press RUN next to the turbo pump logo
- Wait until turbo pump displays "Full Speed"