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•  All chamber doors must be closed
•  All chamber flanges must be in place (no obvious opening)
•  TC1:VGC:11, TC1:VGC:12, TC1-VGC-01, TC1-VGC-02, TC1-VGC-03, TC1-VGC-04 must be closed
•  MEZ-PMF-01 EBARA A70, MEZ-PMF-02 EBARA A70 must be off (if faulted, press RESET)
•  TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed
•  MEZ-GPI-02 must display ~ 6.5e+02 torr (if lower, open MEZ:VGC:18 until restored, then close)
•  TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19 must be closed and allowed to open

Turbo pump startup procedure

•  Open mechome, go the tab "User Devices", open the panel "User Sentry PDU"
•  Turn On "Roughing pump PTM 02 (turbo 2)"
  - after a while, scroll to turbo gate-valve (SEW-VGC-15) will switch to allowed to open.
•  Press OPN on SEW-VGC-15
  - turbo status goes to "OK to Run"
•  Press RUN next to the turbo pump logo
  - turbo status will go through "Accelerating" then "Full Speed" mode

The turbo pump subsystem is now ready for operation.

Pumping procedure

•  Press OPN on TC1-VGC-04
•  Press RUN on MEZ-PMF-01 EBARA A70
•  Press OPN on MEZ:VGC:17 (wait a few seconds if MEZ:VGC:17 cannot open)
•  Press RUN on MEZ-PMF-02 EBARA A70
•  Press OPN on MEZ-VIC-19 (wait a few seconds if MEZ-VIC-19 cannot open)

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If something goes off track during this procedure, initiate the venting procedure and check for leaks (flanges, virtual leaks, waterlines, etc).

Secondary vacuum

Turbo pump startup procedure

This procedure can be done anytime as long as the turbo gate-valve to the target chamber is closed. The following steps assume that the turbo pump branch is fully shutdown (scroll off, scroll to turbo gate-valve closed, turbo off, turbo to target chamber gate-valve-closed). If the system is in an intermediate state, you can restart the following procedure from the corresponding step. In this example, we consider only turbo pump #2 associated with gate-valve TC1-VGC-02.

• Open mechome
• Go the tab "User Devices"
• Open the panel "User Sentry PDU"
• Turn On "Roughing pump PTM 02 (turbo 2)"
  - after a while, scroll to turbo gate-valve (SEW-VGC-15) will switch to allowed to open.
• Press OPN on SEW-VGC-15
  - turbo status goes to "OK to Run"
• Press RUN next to the turbo pump logo
  - turbo status will go through "Accelerating" then "Full Speed" mode

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Prerequisites

• Turbo pump subsystem must be up and running as described above.
• Primary vacuum pumping procedure must have been completed.
• Target chamber Pirani gauge (MEC:TC1:GPI:01) must be below 5.0e-02 torr.
• On the striptool graph, the target chamber Pirani gauge curve should look asymptotic, meaning the primary vacuum subsystem has reached saturation.

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