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List of PVs associated to the vacuum system components
Pumps
| PV | Function | Logical values | |||
|---|---|---|---|---|---|
| MEC:MEZ:PMF:01:MPSTART_SW | Ebara multi-stage pump 1 status (off | 0: Low= | 0off / | on1: High= | 1)on |
| MEC:MEZ:PMF:01:ALMRST_SW | Ebara multi-stage pump 1 reset button | 0: Low / 1: High | |||
| MEC:MEZ:PMF:02:MPSTART_SW | Ebara multi-stage pump 2 status (off | 0: Low=0 off / on1: High=1)on | |||
| MEC:MEZ:PMF:02:ALMRST_SW | Ebara multi-stage pump 1 reset button | 0: Low / 1: High | |||
| MEC:PR60:PWR:1:Outlet:2:SetControlAction | Edwards scroll pump associated with turbo 2 ( | 1: on / 2: 1 off / off3: 2 / reboot: 3) | |||
| MEC:TC1:PTM:02:START_SW | Varian turbo pump 2 status (off | 0: Low=0 off / on1: High=1)on |
Gate-valves
| PV | Function | Logical values | |||
|---|---|---|---|---|---|
| MEC:TC1:VGC:11:OPN_SW | Target chamber venting with compressed dry air (closed | 0: Low= | 0closed / | open1: High= | 1)open |
| MEC:TC1:VGC:12:OPN_SW | Target chamber venting with atmospheric air (closed | 0: Low=0 closed / open1: High=1)open | |||
| MEC:TC1:VGC:1204:OPN_SW | Primary vacuum to line / target chamber () |
...
| 0: Low=open / 1: High=closed | ||
| MEC:MEZ:VGC:18:OPN_SW | Primary vacuum line venting | 0: Low=closed / 1: High=open |
| MEC:MEZ:VGC:17:OPN_SW | Ebara pump 1 / primary vacuum line | 0: Low=closed / 1: High=open |
| MEC:MEZ:VIC:19:OPN_SW | Ebara pump 2 / primary vacuum line | 0: Low=closed / 1: High=open |
| MEC:TC1:VGC:02:OPN_SW | Turbo 2 vacuum line / target chamber | 0: Low=closed / 1: High=open |
| MEC:SEW:VGC:15:OPN_SW | Turbo pump 2 / scroll pump | 0: Low=closed / 1: High=open |
Logical permissions on the gate-valvesÂ
| PV | Function | Logical values |
|---|---|---|
| MEC:TC1:VGC:11:OPN_OK | Target chamber venting with compressed dry air | 0: Low=forbidden / 1: High=allowed |
| MEC:TC1:VGC:12:OPN_OK | Target chamber venting with atmospheric air | 0: Low=forbidden / 1: High=allowed |
| MEC:TC1:VGC:04:OPN_OK | Primary vacuum line / target chamber | 0: Low=forbidden / 1: High=allowed |
| MEC:MEZ:VGC:18:OPN_OK | Primary vacuum line venting | 0: Low=forbidden / 1: High=allowed |
| MEC:MEZ:VGC:17:OPN_OK | Ebara pump 1 / primary vacuum line | 0: Low=forbidden / 1: High=allowed |
| MEC:MEZ:VIC:19:OPN_OK | Ebara pump 2 / primary vacuum line | 0: Low=forbidden / 1: High=allowed |
| MEC:TC1:VGC:02:OPN_OK | Turbo 2 vacuum line / target chamber | 0: Low=forbidden / 1: High=allowed |
| MEC:SEW:VGC:15:OPN_OK | Turbo pump 2 / scroll pump | 0: Low=forbidden / 1: High=allowed |
Pressure gauges
| PV | Function |
|---|---|
| MEC:TC1:GMP:01:PRESS | Target chamber capacitance gauge (out of order) |
| MEC:TC1:GPI:01:PMON | Target chamber Pirani gauge |
| MEC:TC1:GCC:01:PMON | Target chamber cold-cathode gauge |
| MEC:MEZ:GPI:02:PMON | Primary vacuum line Pirani gauge |
| MEC:MEZ:GPI:06:PMON | Ebara pump 1 inlet Pirani gauge |
| MEC:MEZ:GPI:07:PMON | Ebara pump 2 inlet Pirani gauge |
| MEC:SEW:GPI:04:PMON | Scroll (turbo 2) pump inlet Pirani gauge |