...
List of PVs associated to the vacuum system components
Pumps
...
| PV | |
|---|---|
| MEC:MEZ:PMF:01:MPSTART_SW | Ebara multi-stage pump 1 status (off: Low=0 / on: High=1) |
| MEC:MEZ:PMF:01:ALMRST_SW | Ebara multi-stage pump 1 reset button |
| MEC:MEZ:PMF:02:MPSTART_SW | Ebara multi-stage pump 2 status (off: Low=0 / on: High=1) |
| MEC:MEZ:PMF:02:ALMRST_SW | Ebara multi-stage pump 1 reset button |
| MEC:PR60:PWR:1:Outlet:2:SetControlAction | Edwards scroll pump associated with turbo 2 (on: 1 / off: 2 / reboot: 3) |
| MEC:TC1:PTM:02:START_SW | Varian turbo pump 2 status (off: Low=0 / on: High=1) |
Gate-valves
| MEC:TC1:VGC:11:OPN_SW | Target chamber venting with compressed dry air (closed: Low=0 / open: High=1) |
| MEC:TC1:VGC:12:OPN_SW | Target chamber venting with atmospheric air (closed: Low=0 / open: High=1) |
| MEC:TC1:VGC:12:OPN_SW | Primary vacuum to target chamber () |
...