Page History

Multi-stage dry pump (pre-pump)

RUN and STP buttons are used
to operate the pump

statestatus: offOFF mode

Gate-valve

statestatus: closed, not allowed to open

Pressure gauge

state: reading

Multi-stage dry pump (pre-pump)

status: MAIN mode

Gate-valve

status: closed, allowed to open

Pressure gauge

state: out of range

Turbo pump

state: off

Multi-stage dry pump (pre-pump)

status: BOOSTER mode

Gate-valve

status: open, allowed to open

Gate-valve

statestatus: open, not allowed to open
→ may have been forced open

Turbo pump

status: OFF mode

Pressure gauge

green: reading
red: out of range

Turbo pump

status: Accelerating

Pressure interlock display

red: condition not met
green: condition met

Image Removed

Turbo pump

status:

Full Speed

Cold-cathode status display

circle: status display
ENA and DIS buttons are used
to force start or stop the gauge