This document will show you how to calibrate an MKS RGA device through 'Process Eye Professional'. Calibration will be needed when the collected data shows to much noise >46 AMU, not defining 'Baseline-zero' accurately. When baseline-zero is not accurate, data in linear mode will show peaks beneath y-axis 0, after >46 AMU. Use Figure 1 as reference.
Figure 1. RGA Recall Screen of Cart #3 Data
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Figure 2. Leak Valve
Calibration Guide
Initial Prep Guide:
- Gather equipment needed
- Leak valve
- Wrenches
- Nitrogen tubing line
- Relevant Hardware
- Ensure Nitrogen Dewar is full, and/or is at least more than half full.
- Close-off RGA section with its respective valve
- Leaving it under vacuum
- Close-off turbo/roughing pump section with respective valve
- Leaving it under vacuum
- Connect nitrogen line to inlet valve with pressure relief valve
- Allow approximately 5 minutes for system to be backfilled with nitrogen
- Remove blank from RGA cart hose, and replace with leak valve (Reference Figure 2)
- Ensure nitrogen is flowing through the system before starting this step!
- Ensure leak valve is tightly closed before placing onto hose
- Once leak valve is tightly sealed/connected to hose, let the system backfill with nitrogen again
- Make the connection to the leak valve at the end of the hose, making sure to tighten bolts all the way until metal to metal contact is made.
- Backfill for approx. 3-4 minutes
- Remove nitrogen line from current position and relocate to it respective spot on the leak valve
- Let backfill for 2-3 minutes
Software Guide:
- Log in to computer
- Go into 'Process Eye Professional'
- Click on 'Recipe List'
- Click on 'Easy View'
- The RGA connected to computer through ethernet will have a distinct filled in symbol to its left.
- This will bring up a tab inside of Process Eye
- O
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