Table of contents
| Table of Contents |
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Multi-stage dry vacuum pump Ebara A70
Ebara A70W is a multi-stage dry pump from the second generation of dry pumping solutions introduced by Ebara. It has a compact design and includes various sensors and controls. The A70W features a dry pump and a blower, both based on a tri-lobe rotor design.
| Pumping speed | Ultimate vacuum | Motor power | Inlet | Exhaust |
|---|---|---|---|---|
| 300 CFM | 1 mTorr | 5.9 kW | NW50 | NW40 |
Scroll pump Edwards xds35i
XDS scroll pumps have become industry standard when dry pumping is essential, proving to be a robust and clean vacuum pump solution in a range of applications and processes. Its bearing shield separates process gases and bearing lubrication to ensure clean vacuum and no possibility of contamination to lubrication from process gases, which prolongs bearing life. The smart motor drive feature comprises consistent performance globally, pump overload protection and remote start/stop capability. The high flow gas ballast allows pumping of vapors including water vapor at up to 240 g/h. The simple single sided scroll design allows maintenance to be done in minutes for low cost of ownership and maximum up-time.
| Peak pumping speed | Ultimate vacuum | with gas ballast I | with gas ballast II | Max. inlet pressure for water vapor | Water vapor handling capacity | Max. continuous inlet pressure | Max. gas ballast/purge pressure |
|---|---|---|---|---|---|---|---|
| 21 CFM | 8 mTorr | 15 mTorr | < 7.5 Torr | 23 Torr | 240 g/h | 30 Torr a | 7 psig |
Performance
Dimensions
Turbo pump Varian TV-2KG
The high-throughput turbomolecular pump, Turbo-V 2K-G, is a dedicated vacuum pumping system offering 1600 L/s pumping speed. The Turbo-V 2K-G is designed for industrial use specifically as a turbo pump for thin film deposition equipment. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of argon under high temperature load.
Performance
Dimensions
Overview of the pumping control system
Default setup of the pumping system
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MEC vacuum system control diagram with the current temporary modifications
The target chamber is in a secondary vacuum state on this sketch. The primary subsystem is vented and the maglev (gate-valve TC1-VGC-01 open/green) is pumping the chamber which reached 2.0e-04 torr Torr on the cold-cathode gauge (the pirani gauge reached its lower readout limit). The Varian turbo branch (gate-valve TC1-VGC-02 closed/red) is not activated yet, but the turbo is accelerating after startup as shown by the yellow circle.
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| Component | Description | Component | Description |
|---|---|---|---|
| Multi-stage dry pump (pre-pump) RUN and STP buttons are used status: OFF mode |
| Gate-valve status: closed, not allowed to open |
| Multi-stage dry pump (pre-pump) status: MAIN mode |
| Gate-valve status: closed, allowed to open |
| Multi-stage dry pump (pre-pump) status: BOOSTER mode |
| Gate-valve status: open, allowed to open |
| Scroll pump |
| Gate-valve status: open, not allowed to open |
| Turbo pump status: OFF mode |
| Pressure gauge green: reading |
| Turbo pump status: Accelerating |
| Pressure interlock display red: condition not met |
| Turbo pump status: Full Speed |
| Cold-cathode status display circle: status display |
List of PVs associated to the vacuum system components
Pumps
| PV | Function | Logical values |
|---|---|---|
| MEC:MEZ:PMF:01:MPSTART_SW | Ebara multi-stage pump 1 status | 0: Low=off / 1: High=on |
| MEC:MEZ:PMF:01:ALMRST_SW | Ebara multi-stage pump 1 reset button | 0: Low / 1: High |
| MEC:MEZ:PMF:02:MPSTART_SW | Ebara multi-stage pump 2 status | 0: Low=off / 1: High=on |
| MEC:MEZ:PMF:02:ALMRST_SW | Ebara multi-stage pump 1 reset button | 0: Low / 1: High |
| MEC:PR60:PWR:1:Outlet:2:SetControlAction | Edwards scroll pump associated with turbo 2 | 1: on / 2: off / 3: reboot |
| MEC:TC1:PTM:02:START_SW | Varian turbo pump 2 status | 0: Low=off / 1: High=on |
Gate-valves
| PV | Function | Logical values |
|---|---|---|
| MEC:TC1:VGC:11:OPN_SW | Target chamber venting with compressed dry air | 0: Low=closed / 1: High=open |
| MEC:TC1:VGC:12:OPN_SW | Target chamber venting with atmospheric air | 0: Low=closed / 1: High=open |
| MEC:TC1:VGC:04:OPN_SW | Primary vacuum line / target chamber | 0: Low=open / 1: High=closed |
| MEC:MEZ:VGC:18:OPN_SW | Primary vacuum line venting | 0: Low=closed / 1: High=open |
| MEC:MEZ:VGC:17:OPN_SW | Ebara pump 1 / primary vacuum line | 0: Low=closed / 1: High=open |
| MEC:MEZ:VIC:19:OPN_SW | Ebara pump 2 / primary vacuum line | 0: Low=closed / 1: High=open |
| MEC:TC1:VGC:02:OPN_SW | Turbo 2 vacuum line / target chamber | 0: Low=closed / 1: High=open |
| MEC:SEW:VGC:15:OPN_SW | Turbo pump 2 / scroll pump | 0: Low=closed / 1: High=open |
Logical permissions on the gate-valves
| PV | Function | Logical values |
|---|---|---|
| MEC:TC1:VGC:11:OPN_OK | Target chamber venting with compressed dry air | 0: Low=forbidden / 1: High=allowed |
| MEC:TC1:VGC:12:OPN_OK | Target chamber venting with atmospheric air | 0: Low=forbidden / 1: High=allowed |
| MEC:TC1:VGC:04:OPN_OK | Primary vacuum line / target chamber | 0: Low=forbidden / 1: High=allowed |
| MEC:MEZ:VGC:18:OPN_OK | Primary vacuum line venting | 0: Low=forbidden / 1: High=allowed |
| MEC:MEZ:VGC:17:OPN_OK | Ebara pump 1 / primary vacuum line | 0: Low=forbidden / 1: High=allowed |
| MEC:MEZ:VIC:19:OPN_OK | Ebara pump 2 / primary vacuum line | 0: Low=forbidden / 1: High=allowed |
| MEC:TC1:VGC:02:OPN_OK | Turbo 2 vacuum line / target chamber | 0: Low=forbidden / 1: High=allowed |
| MEC:SEW:VGC:15:OPN_OK | Turbo pump 2 / scroll pump | 0: Low=forbidden / 1: High=allowed |
Pressure gauges
| PV | Function |
|---|---|
| MEC:TC1:GMP:01:PRESS | Target chamber capacitance gauge (out of order) |
| MEC:TC1:GPI:01:PMON | Target chamber Pirani gauge |
| MEC:TC1:GCC:01:PMON | Target chamber cold-cathode gauge |
| MEC:MEZ:GPI:02:PMON | Primary vacuum line Pirani gauge |
| MEC:MEZ:GPI:06:PMON | Ebara pump 1 inlet Pirani gauge |
| MEC:MEZ:GPI:07:PMON | Ebara pump 2 inlet Pirani gauge |
| MEC:SEW:GPI:04:PMON | Scroll (turbo 2) pump inlet Pirani gauge |
Tools necessary for operation
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tc_vacuum
In a terminal logged as mecopr, type tc_vacuum to open the above window. Often called "striptool", this type of window can display the time evolution of some environmental parameters. Here it shows 4 curves monitoring the pressure value read by 4 different gauges. You can reshape the window and change the time axis range to monitor pressure values over a long time span (~ 1 hour). The curves correspond to the following gauges:
MEC:TC1:GPI:01:PMON → target chamber Pirani gauge
MEC:TC1:GCC:01:PMON → target chamber Cold-cathode gauge
MEC:SEW:GPI:03:PMON → scroll pump Pirani gauge (Maglev roughing)
MEC:SEW:GPI:04:PMON → scroll pump Pirani gauge (Varian turbo roughing)
Version tracking
| Version | Release date | Description |
|---|---|---|
| v1.00 |
| Demonstration version |
| v1.01 |
| Added technical information on each pump |