Readiness checklist

•  Hutch must be open
•  Stand next to the target chamber (be ready to react once venting is completed to avoid over-pressurization)

Venting procedure

•  Press INSERT GL in the BERYLLIUM WINDOW SYSTEM section (glass window triangle logo must be red)
•  Check

Primary vacuum

Prerequisites

...

• TC1-VGC-01, TC1-VGC-02, TC1-VGC-03,

...

• TC1-VGC-04,

...

• VGC

...

Primary vacuum pumping procedure

• Press OPN on TC1-VGC-04 (primary vacuum gate-valve to chamber)
• Press RUN on MEZ-PMF-01 (pre-pump 1)
• Press OPN on MEZ:VGC:17 (pre-pump 1 gate-valve to primary pumping line)
  - wait until allowed to open if MEZ:VGC:17 cannot open
• Press RUN on MEZ-PMF-02 (pre-pump 2)
• Press OPN on MEZ-VIC-19 (pre-pump 2 gate-valve to primary pumping line)
  - wait until allowed to open if MEZ-VIC-19 cannot open

Both Ebara pumps will start running in MAIN mode. On the striptool graph, the target chamber Pirani gauge value should drop rapidly. Once pre-pump Pirani gauges (MEZ-GPI-06 and MEZ-GPI-07) drop below 7.5e+00 torr, the Ebara pumps will start running in BOOSTER mode (typically after 10-15 minutes from startup). The primary vacuum procedure is finished when the target chamber Pirani gauge (MEC:TC1:GPI:01) drops below 5.0e-02 torr (typically after 30-40 minutes from startup).

If something goes off track during this procedure, initiate the venting procedure and check for leaks (flanges, virtual leaks, waterlines, etc).

Secondary vacuum

Turbo pump startup procedure

This procedure can be done anytime as long as the turbo gate-valve to the target chamber is closed. The following steps assume that the turbo pump branch is fully shutdown (scroll off, scroll to turbo gate-valve closed, turbo off, turbo to target chamber gate-valve-closed). If the system is in an intermediate state, you can restart the following procedure from the corresponding step. In this example, we consider only turbo pump #2 associated with gate-valve TC1-VGC-02.

...

• -09 (gate valves leading to the target chamber)
•  Press CLS on all open gate valves leading to the chamber (their triangle logos must all be red)
•  Remove the 4 locks on one of the target chamber doors
•  Press OPN on TC1:VGC:11 (the following window will open)
  Image Added
•  Press Yes and close the window immediately (pay attention to the sound)
•  Wait until you can hear the compressed dry air intake loudly
•  Press CLS on TC1:VGC:11 immediately
•  Open 1 or 2 target chamber doors, hook them open with the rubber string
•  Allow some time to ventilate the chamber before doing anything inside the target chamber
•  If you are not going to pump down again right away, please follow the Turbo pump shutdown procedure below

Turbo pump shutdown

•  Turn the gas ballast control knob of the scroll pump to level I
•  If you are going to pump down within the next hour, stop here, otherwise continue the procedure
•  Press STP next to the turbo pump logo
•  Allow at least 15-20 minutes for the turbo pump to spin down (the off-status logo does not mean the blades have stopped spinning)
•  Press CLS on SEW-VGC-15
•  If you are going to pump down within the next 12 hours, stop here, otherwise continue the procedure
•  Turn the gas ballast control knob of the scroll pump to level 0
•  Open mechome, go to the tab "User Devices", open the panel "User Sentry PDU"
•  Turn On "Roughing pump PTM 02 (turbo 2)"

...

Version tracking

...

The turbo pump subsystem is now ready for operation.

Prerequisites

• Turbo pump subsystem must be up and running as described above.
• Primary vacuum pumping procedure must have been completed.
• Target chamber Pirani gauge (MEC:TC1:GPI:01) must be below 5.0e-02 torr.
• On the striptool graph, the target chamber Pirani gauge curve should look asymptotic, meaning the primary vacuum subsystem has reached saturation.

Secondary vacuum pumping procedure

• Press OPN on TC1-VGC-02
  - primary vacuum gate-valve will automatically close first, before turbo gate-valve opens → do not forget the primary vacuum shutdown procedure below
  - target chamber Pirani gauge value should plummet, until it goes out of range and the target chamber cold-cathode gauge takes turn
• Press STP on both Ebara pumps
• Press CLS on MEZ:VGC:17 and MEZ-VIC-19
• Press OPN on MEZ:VGC:18
  - primary vacuum line will start venting
  - wait until Pirani gauge MEZ-GPI-02 goes above ~ 6.5e+02 torr
• Press CLS on MEZ:VGC:18
  - primary vacuum venting valve should not stay open longer than ~ 5 minutes as it may heat up too much

...