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documents:

documents:

...

MKS RGA hardware manual

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Amanda's doc: RGA Cart Maintenance and Operation

...

.

Start up

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procedures:

General

prep

general prep

• • if you're not hooking the cart up to another chamber, no prep needed.
•  
  • if you are hooking the cart up to another chamber:

before hooking it up, do this: 

1. Bring an N2 cylinder, clean regulator, and clean hose.

2. With no pumps running

3.

...

begin venting the cart with the N2

begin venting the cart with the N2

Attach N2 hose to cart vent assembly (insert pic).

open nitrogen source's valve enough to hear the cart's pressure relief valve gently hissing.

open the cart's vent valve

open any valves between the vent valve and the hose

4. remove the blank at the end of the hose

5. Attach the cart to the to-be-qualified chamber, but do not(!) open the valve between chamber and hose.

valve in

...

to the other chamber only after qualifying the cart itself first with Peter Stefan.

Cart specifics (assumes you've done the prep listed above)

Carts 1 & 2

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Cart startup procedure:

CAUTION: plugging the cart in to an electrical socket will immediately start up the roughing pump. 

(section to be completed)

turbo controller, bottom right: 

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Carts 3 & 4

These are level 3 carts. they aren't (and won't be) level 1 because they have some rubber seals. 

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valves:

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Cart startup procedure:

1. Plug in the cart

2. Hit start (F1, circled in pic). This will turn on the roughing and turbo

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1. 1. 1. 1. Open the gate valve on top of the turbo
         2. When turbo hits
      ~200Hz
      2. 1. ~100Hz: Turn on the CCG
         2. Wait for turbo to settle at 1000Hz and 1A (info on display).

1. 1. 1. 1. 1. If this happens, you’re DONE!
            2. If this does not happen, begin troubleshooting: checking pressure, looking for leaks.
               1. If issues persist, initiate cart shutdown:

1. 1. 1. 1. 1. 1. 1. open the N2 cylinder and regulator
                  2. confirm N2 is coming out of the cart’s PRV
                  3. close the gate valve on top of turbo
                  4. hit Stop (also F1). This stops the turbo + roughing, and automatically vents through the turbo.
                  5. open the small N2 valve on left side of cart, this vents N2 above the closed gate valve.
                  6. wait for vent to complete, confirm N2 is coming out of the cart’s PRV
                  7. close the small N2 valve on left side of cart, close the N2 cylinder

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Cart 5

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venting/purging system

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Shut down

(to be filled)

General

carts 1 and 2

carts 3 and 4

cart 5

Trouble Shooting:

general:

roughing pump

valves

documentation:

Turbo:

carts 1, 2, and 5

...

:

• • • • pfeiffer hipace 80 turbo - operating instructions
      • pfeiffer TC110 - operating instructions (hipace80's electronic drive unit)
      • pfeiffer turbo controller - manual