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- Acquire a new DVB402B-EVS board from Ebara (~$350)
P/N: A-2150-030-9200, BOARD, MOUNTING, FR4, 4LAYER, 1.6MM, 190-65, DVP401B-EVS
- Request that Ebara programs it before sending the board. Otherwise an Ebara tech will need to come on site and load software onto the new board once installed.
- Follow the steps for replacing the DVP402B board, but continue to disconnect the final 2 connectors
- With the top board (DVP401B) removed, swap the standoffs and jumper from the old DVP401B-EVS board to the new one.
- Reattach the old (or new) DVP401B board, and follow the previous sections procedure to reinstall the board assembly.
- If the board was not-preprogrammed, then power the pump on and have the Ebara service tech load the new software.
- If the repair was successful, then reprogram the pump to not require N2 purge gas by following the instructions here:
Instructions to change an EV-S100P to EV-S100 (no N2 purge gas) - Reassemble the foreline and lead shielding using the reverse steps as above.
- Test that the pump operates in both local mode, and switch to "COM" mode and test controls through Epics.
If the roughing pump will not restart, then some component has likely suffered radiation damage and needs to be replaced. This guide will provide instructions for several of the hardware fixes undertaken so far.
For more assistance or for parts, contact the Ebara service technician: Steve Gapuz - email: sgapuz@ebaratech.com, or sales person: Keith Barnes - email: kbarnes@semitorrdist.com.
Steps for replacement of several internal pump components:
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Remove shielding from around the pump
- Ensure the pump is stopped and the foreline valve closed.
- Remove the bricks from on top of the pump, noting where the bricks came from so you can replace them somewhat similarly.
- Remove the first layer of polyethylene shielding.
- Undo the KF flange clamp and foil both sides. Undo the connector to the valve and move the foreline to the side to somewhere safe and secure.
- Remove the second layer of polyethylene and aluminum plate,
Remove the cover from the pump
- Unplug the power cord and place it somewhere within site.
- Undo the ISO-80 flange and foil both sides. Set the conical adapter aside
- Remove the 4 screws surrounding the inlet port and remove the plates on either side of the port.
- Undo the screws on front and back end of the top cover (2 in total).
- There are more screws on the sides, but these should have been removed before the lead shielding was added.
- Lift the cover off.
Troubleshoot the YASKAWA V1000 units
- Plug the pump back in and power on.
- Wait for ~10 seconds for pump to initialize.
- Look at both of the V1000 units. If the ALM indicator is lit, then that unit has a problem and should be replaced.
- The photo below shows one faulty unit on the left, and a good unit on the right
Replace a faulty YASKAWA V1000 pump "Driver" units
Note - this procedure was required to fix the DS1 pump in summer 2022.
The symptom was: on restart the pump thinks it is a EV-S20P model, not EV-S100P, and only the booster pump would run.
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Replace a faulty DVP402B
Note - this procedure was required to replace the DVB402B board on DS2 in fall 2022.
Symptom was the handheld controller reporting "IO COMM. ERROR" with error code 26 03
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- P/N #A-2050-036-2400, BOARD, DRY, COMM, V10L05, DVP402B-V10L05
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- Connect the two boards together
- Make all the connections, including the ground
- Reattach the boards to the pump body
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Quotes for repairs:
Yaskawa V1000 pump driver:
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