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  1. Acquire a new DVB402B-EVS board from Ebara (~$350)

    1. P/N: A-2150-030-9200, BOARD, MOUNTING, FR4, 4LAYER, 1.6MM, 190-65, DVP401B-EVS

    2. Request that Ebara programs it before sending the board. Otherwise an Ebara tech will need to come on site and load software onto the new board once installed.

  2. Follow the steps for replacing the DVP402B board, but continue to disconnect the final 2 connectors
  3. With the top board (DVP401B) removed, swap the standoffs and jumper from the old DVP401B-EVS board to the new one.
  4. Reattach the old (or new) DVP401B board, and follow the previous sections procedure to reinstall the board assembly.
  5. If the board was not-preprogrammed, then power the pump on and have the Ebara service tech load the new software.
  6. If the repair was successful, then reprogram the pump to not require N2 purge gas by following the instructions here:
    Instructions to change an EV-S100P to EV-S100 (no N2 purge gas)

  7. Reassemble the foreline and lead shielding using the reverse steps as above.
  8. Test that the pump operates in both local mode, and switch to "COM" mode and test controls through Epics.


If the roughing pump will not restart, then some component has likely suffered radiation damage and needs to be replaced. This guide will provide instructions for several of the hardware fixes undertaken so far.

For more assistance or for parts, contact the Ebara service technician: Steve Gapuz - email: sgapuz@ebaratech.com, or sales person: Keith Barnes - email: kbarnes@semitorrdist.com.


Steps for replacement of several internal pump components:

Table of Contents

Remove shielding from around the pump

Image Added  Image Added

  1. Ensure the pump is stopped and the foreline valve closed.
  2. Remove the bricks from on top of the pump, noting where the bricks came from so you can replace them somewhat similarly.
  3. Remove the first layer of polyethylene shielding.
  4. Undo the KF flange clamp and foil both sides.  Undo the connector to the valve and move the foreline to the side to somewhere safe and secure.
  5. Remove the second layer of polyethylene and aluminum plate,

Remove the cover from the pump

  1. Unplug the power cord and place it somewhere within site.
  2. Undo the ISO-80 flange and foil both sides. Set the conical adapter aside
  3. Remove the 4 screws surrounding the inlet port and remove the plates on either side of the port.
  4. Undo the screws on front and back end of the top cover (2 in total).
  5. There are more screws on the sides, but these should have been removed before the lead shielding was added.
  6. Lift the cover off.

Image Added

Troubleshoot the YASKAWA V1000 units

  1. Plug the pump back in and power on.
  2. Wait for ~10 seconds for pump to initialize.
  3. Look at both of the V1000 units. If the ALM indicator is lit, then that unit has a problem and should be replaced.
    1. The photo below shows one faulty unit on the left, and a good unit on the right

Image Added


Replace a faulty YASKAWA V1000 pump "Driver" units

Note - this procedure was required to fix the DS1 pump in summer 2022.

The symptom was: on restart the pump thinks it is a EV-S20P model, not EV-S100P, and only the booster pump would run.

  1. Acquire a new YASKAWA V1000 from Ebara (~$1000)
  2. Unplug the power cord and place it somewhere within site.
  3. Open the top cover of the pump (steps above).
  4. Remove the top panel from the V1000 by removing the top screw and lifting off the plate with the V100 label.
    It should now look like below:
    Image Added

  5. Remove the 8 wires visible in the photo above from the terminal blocks
  6. Remove the plastic panel below the wires you just disconnected. I think it just pulls out.
    It should now look like below:
    Image Added

  7. Remove the 6 wires visible in the photo above from the terminal blocks
  8. There is a final wire to remove - the ground wire BP-E shown below
    Image Added

  9. Remove the 4 screws on the corners of the V1000 unit, then lift up.
    There is thermal paste underneath V1000 so it can be difficult to separate from the pump body. Inserting a sharp screwdriver underneath can help.

  10. To install the new V1000 follow this steps in reverse, applying new thermal paste to the bottom of the new V1000.
  11. After the V1000 is fully connected, plug the pump in a power it up to see if the ALM indicator is no longer illuminated.

  12. Reprogram the pump to not require N2 purge gas by following the instructions here:
    Instructions to change an EV-S100P to EV-S100 (no N2 purge gas)

  13. Reassemble the foreline and lead shielding using the reverse steps as above.
  14. Test that the pump operates in both local mode, and switch to "COM" mode and test controls through Epics.

Replace a faulty DVP402B

Note - this procedure was required to replace the DVB402B board on DS2 in fall 2022.

Symptom was the handheld controller reporting "IO COMM. ERROR" with error code 26 03


  1. Acquire a new DVB402B board from Ebara (~$160)
    1. P/N #A-2050-036-2400, BOARD, DRY, COMM, V10L05, DVP402B-V10L05
  2. Unplug the power cord and place it somewhere within site.
  3. Open the top cover of the pump (steps above). The DVB402B board is the top board that is pointed to below. The DVB402B board is mounted on top of the DVP402B-EVS board.
    Image Added
  4. Remove the aisle side poly shielding by lifting it straight up. Remove the few bricks behind the board that we're replacing.
    Image Added

  5. Remove the two screws that hold the board to the pump body. These are approximately where the arrows point at below.  They screw in from the outside of the pump, so that is why the shielding was removed. Use a small Phillips screw driver to remove the two screws.
    Image Added
  6. There are lots of connectors to remove now. See the photos below:
    Image Added Image AddedImage Added

    Image Added  Image Added  Image Added

    Image Added  Image Added

  7. There should be 2 more connectors still attached at this point, but they can stay as you should have enough room to work now.
  8. Undo the 4 screws on the corners of the upper board. It will still be connected by a connector between the boards
  9. Gently separate the two boards.
  10. Move the jumper cable from the old board to the new board
    Image Added

  11. Work in reverse to reinstall the new board.
    1. Connect the two boards together
    2. Make all the connections, including the ground
    3. Reattach the boards to the pump body
  12. After it is fully connected again, plug the pump in and connect the handheld controller. If the repair was successful then the "IO COMM ERR" message will be gone.

  13. Reprogram the pump to not require N2 purge gas by following the instructions here:
    Instructions to change an EV-S100P to EV-S100 (no N2 purge gas)

  14. Reassemble the foreline and lead shielding using the reverse steps as above.
  15. Test that the pump operates in both local mode, and switch to "COM" mode and test controls through Epics.

Quotes for repairs:

Yaskawa V1000 pump driver:

View file
nameETI EV-S Pump Quote 22-29768 - A - SLAC CA - Pump Driver.pdf
height250


DVP402B board:

View file
nameETI Quote 22-30106 - B - SLAC CA DVP402 Mounting Board - CORRECT QUOTE.pdf
height250


DVP402B-EVS board:

View file
nameETI Quote 22-30002 - A - SLAC CA DVP401 Circuit Board.pdf
height250