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For more assistance or for parts, contact the Ebara service technician: Steve Gapuz - email: sgapuz@ebaratech.com, or sales person: Keith Barnes - email: kbarnes@semitorrdist.com.
Steps for replacement of several internal pump components:
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Remove shielding from around the pump
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- Plug the pump back in and power on.
- Wait for ~10 seconds for pump to initialize.
- Look at both of the V1000 units. If the ALM indicator is lit, then that unit has a problem and should be replaced.
- The photo below shows one faulty unit on the left, and a good unit on the right
Replace a faulty YASKAWA V1000 units
- Acquire a new YASKAWA V1000 from Ebara (~$1000)
- Unplug the power cord and place it somewhere within site.
- Remove the top panel from the V1000 by removing the top screw and lifting off the plate with the V100 label.
It should now look like below: - Remove the 8 wires visible in the photo above from the terminal blocks
- Remove the plastic panel below the wires you just disconnected. I think it just pulls out.
It should now look like below: - Remove the 6 wires visible in the photo above from the terminal blocks
- There is a final wire to remove - the ground wire BP-E shown below
- Remove the 4 screws on the corners of the V1000 unit, then lift up.
There is thermal paste underneath V1000 so it can be difficult to separate from the pump body. Inserting a sharp screwdriver underneath can help. - To install the new V1000 follow this steps in reverse, applying new thermal paste to the bottom of the new V1000.
- After the V1000 is fully connected, plug the pump in a power it up to see if the ALM indicator is no longer illuminated.
- Reprogram the pump to not require N2 purge gas by following the instructions here: