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| Component | Description | Component | Description |
|---|---|---|---|
| Multi-stage dry pump (pre-pump) RUN and STP buttons are used status: OFF mode |
| Gate-valve status: closed, not allowed to open |
| Multi-stage dry pump (pre-pump) status: MAIN mode |
| Gate-valve status: closed, allowed to open |
| Multi-stage dry pump (pre-pump) status: BOOSTER mode |
| Gate-valve status: open, allowed to open |
| Scroll pump |
| Gate-valve status: open, not allowed to open |
| Turbo pump status: OFF mode |
| Pressure gauge green: reading |
| Turbo pump status: Accelerating |
| Pressure interlock display red: condition not met |
| Turbo pump status: Full Speed |
| Cold-cathode status display circle: status display |
List of PVs associated to the vacuum system components
Pumps
| PV | Function | Logical values |
|---|---|---|
| MEC:MEZ:PMF:01:MPSTART_SW | Ebara multi-stage pump 1 status | 0: Low=off / 1: High=on |
| MEC:MEZ:PMF:01:ALMRST_SW | Ebara multi-stage pump 1 reset button | 0: Low / 1: High |
| MEC:MEZ:PMF:02:MPSTART_SW | Ebara multi-stage pump 2 status | 0: Low=off / 1: High=on |
| MEC:MEZ:PMF:02:ALMRST_SW | Ebara multi-stage pump 1 reset button | 0: Low / 1: High |
| MEC:PR60:PWR:1:Outlet:2:SetControlAction | Edwards scroll pump associated with turbo 2 | 1: on / 2: off / 3: reboot |
| MEC:TC1:PTM:02:START_SW | Varian turbo pump 2 status | 0: Low=off / 1: High=on |
Gate-valves
| PV | Function | Logical values |
|---|---|---|
| MEC:TC1:VGC:11:OPN_SW | Target chamber venting with compressed dry air | 0: Low=closed / 1: High=open |
| MEC:TC1:VGC:12:OPN_SW | Target chamber venting with atmospheric air | 0: Low=closed / 1: High=open |
| MEC:TC1:VGC:04:OPN_SW | Primary vacuum line / target chamber | 0: Low=open / 1: High=closed |
| MEC:MEZ:VGC:18:OPN_SW | Primary vacuum line venting | 0: Low=closed / 1: High=open |
| MEC:MEZ:VGC:17:OPN_SW | Ebara pump 1 / primary vacuum line | 0: Low=closed / 1: High=open |
| MEC:MEZ:VIC:19:OPN_SW | Ebara pump 2 / primary vacuum line | 0: Low=closed / 1: High=open |
| MEC:TC1:VGC:02:OPN_SW | Turbo 2 vacuum line / target chamber | 0: Low=closed / 1: High=open |
| MEC:SEW:VGC:15:OPN_SW | Turbo pump 2 / scroll pump | 0: Low=closed / 1: High=open |
Logical permissions on the gate-valves
| PV | Function | Logical values |
|---|---|---|
| MEC:TC1:VGC:11:OPN_OK | Target chamber venting with compressed dry air | 0: Low=forbidden / 1: High=allowed |
| MEC:TC1:VGC:12:OPN_OK | Target chamber venting with atmospheric air | 0: Low=forbidden / 1: High=allowed |
| MEC:TC1:VGC:04:OPN_OK | Primary vacuum line / target chamber | 0: Low=forbidden / 1: High=allowed |
| MEC:MEZ:VGC:18:OPN_OK | Primary vacuum line venting | 0: Low=forbidden / 1: High=allowed |
| MEC:MEZ:VGC:17:OPN_OK | Ebara pump 1 / primary vacuum line | 0: Low=forbidden / 1: High=allowed |
| MEC:MEZ:VIC:19:OPN_OK | Ebara pump 2 / primary vacuum line | 0: Low=forbidden / 1: High=allowed |
| MEC:TC1:VGC:02:OPN_OK | Turbo 2 vacuum line / target chamber | 0: Low=forbidden / 1: High=allowed |
| MEC:SEW:VGC:15:OPN_OK | Turbo pump 2 / scroll pump | 0: Low=forbidden / 1: High=allowed |
Pressure gauges
| PV | Function |
|---|---|
| MEC:TC1:GMP:01:PRESS | Target chamber capacitance gauge (out of order) |
| MEC:TC1:GPI:01:PMON | Target chamber Pirani gauge |
| MEC:TC1:GCC:01:PMON | Target chamber cold-cathode gauge |
| MEC:MEZ:GPI:02:PMON | Primary vacuum line Pirani gauge |
| MEC:MEZ:GPI:06:PMON | Ebara pump 1 inlet Pirani gauge |
| MEC:MEZ:GPI:07:PMON | Ebara pump 2 inlet Pirani gauge |
| MEC:SEW:GPI:04:PMON | Scroll (turbo 2) pump inlet Pirani gauge |
Tools necessary for operation
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