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Venting

Prerequisites

• If ending operation with the x-ray beamline, make sure that the pulse picker is closed, stopper S6 is inserted, hutch search is broken and glass window inserted.
• Stand next to the chamber during the procedure to be ready to react once the chamber is vented and avoid over-pressurization.

Venting procedure

• Press CLS on all opened gate-valves connecting a vacuum line to the chamber (TC1
• All chamber doors must be closed.
• All chamber ports must be covered.
• All gate-valves to the chamber must be closed (TC1:VGC:11, TC1:VGC:12, TC1-VGC-01, TC1-VGC-02, TC1-VGC-03, TC1-VGC-04).
• Both Ebara pre-pumps must be off. If faulted, press RESET.
• All gate-valves in the primary vacuum subsystem must be closed (TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19).
• Primary pumping line must be vented with Pirani gauge (MEZ-GPI-02) displaying ~ 6.5e+02 torr. If pressure is lower, use venting valve (MEZ:VGC:18) until situation is restored.
• All gate-valves in the primary vacuum subsystem must be closed and allowed to open (TC1-VGC-04, MEZ:VGC:17, MEZ:VGC:18, MEZ-VIC-19).

Primary vacuum pumping procedure

• Press OPN on TC1-VGC-04 (primary vacuum gate-valve to chamber)
• Press RUN on MEZ-PMF-01 (pre-pump 1)
• Press OPN on MEZ:VGC:17 (pre-pump 1 gate-valve to primary pumping line)
  - wait until allowed to open if MEZ:VGC:17 cannot open
• Press RUN on MEZ-PMF-02 (pre-pump 2)
• Press OPN on MEZ-VIC-19 (pre-pump 2 gate-valve to primary pumping line)
  - wait until allowed to open if MEZ-VIC-19 cannot open

Both Ebara pumps will start running in MAIN mode. On the striptool graph, the target chamber Pirani gauge value should drop rapidly. Once pre-pump Pirani gauges (MEZ-GPI-06 and MEZ-GPI-07) drop below 7.5e+00 torr, the Ebara pumps will start running in BOOSTER mode (typically after 10-15 minutes from startup). The primary vacuum procedure is finished when the target chamber Pirani gauge (MEC:TC1:GPI:01) drops below 5.0e-02 torr (typically after 30-40 minutes from startup).

If something goes off track during this procedure, initiate the venting procedure and check for leaks (flanges, virtual leaks, waterlines, etc).

Secondary vacuum

Turbo pump startup procedure

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• Press OPN on TC1:VGC:11
  - a new window will open
  Image Added
• Press Yes and close the window immediately
  - chamber will start venting
• Optional: Press OPN on on TC1:VGC:12 when allowed
  - after a while, doors can open and you will hear the compressed dry air intake loudly
• Press CLS on TC1:VGC:11, and on on TC1:VGC:12 if necessary
• Open the chamber doors and let some time to ventilate the chamber before breathing inside the chamber

Turbo pump shutdown

It is not mandatory to shutdown the turbo pump during each venting cycle. We usually let it run when venting for a short time during a shift. If venting for a longer time between two shifts, we usually turn off the turbo pump but not its rouging. The following steps describe a full shutdown of the turbo line after venting.

• Press STP next to the turbo pump logo
  - let the turbo spin down for at least 15-20 minutes (the off-status logo on the turbo does not mean the blades have stopped spinning)
  - stop at this step if you will restart the turbo in less than a day, additionally you can set the scroll ballast to level I (it can be set to level 0 or I during operation)
• Press CLS on SEW-VGC-15
  - make sure ballast level is set to 0 before going to the next step
• Open mechome
• Go the tab "User Devices"
• Open the panel "User Sentry PDU"
• Turn On Off "Roughing pump PTM 02 (turbo 2)"
  - after a while, scroll to turbo gate-valve (SEW-VGC-15) will switch to allowed to open.
• Press OPN on SEW-VGC-15
  - turbo status goes to "OK to Run"
• Press RUN next to the turbo pump logo
  - turbo status will go through "Accelerating" then "Full Speed" mode

The turbo pump subsystem is now ready for operation.

Prerequisites

• Turbo pump subsystem must be up and running as described above.
• Primary vacuum pumping procedure must have been completed.
• Target chamber Pirani gauge (MEC:TC1:GPI:01) must be below 5.0e-02 torr.
• On the striptool graph, the target chamber Pirani gauge curve should look asymptotic, meaning the primary vacuum subsystem has reached saturation.

Secondary vacuum pumping procedure

• Press OPN on TC1-VGC-02
  - primary vacuum gate-valve will automatically close first, before turbo gate-valve opens → do not forget the primary vacuum shutdown procedure below
  - target chamber Pirani gauge value should plummet, until it goes out of range and the target chamber cold-cathode gauge takes turn
• Press STP on both Ebara pumps
• Press CLS on MEZ:VGC:17 and MEZ-VIC-19
• Press OPN on MEZ:VGC:18
  - primary vacuum line will start venting
  - wait until Pirani gauge MEZ-GPI-02 goes above ~ 6.5e+02 torr
• Press CLS on MEZ:VGC:18
  - primary vacuum venting valve should not stay open longer than ~ 5 minutes as it may heat up too much

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