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Nomenclature of the vacuum system components

ComponentDescriptionComponentDescription

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Multi-stage dry pump (pre-pump)

RUN and STP buttons are used
to operate the pump

status: OFF mode

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Gate-valve

status: closed, not allowed to open

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Multi-stage dry pump (pre-pump)

status: MAIN mode

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Gate-valve

status: closed, allowed to open

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Multi-stage dry pump (pre-pump)

status: BOOSTER mode

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Gate-valve

status: open, allowed to open

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Scroll pump

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Gate-valve

status: open, not allowed to open
→ may have been forced open

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Turbo pump

status: OFF mode

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Pressure gauge

green: reading
red: out of range

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Turbo pump

status: Accelerating

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Pressure interlock display

red: condition not met
green: condition met

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Turbo pump

status: Full Speed

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Cold-cathode status display

circle: status display
ENA and DIS buttons are used
to force start or stop the gauge

Tools necessary for operation

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