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Nomenclature of the vacuum system components
Component | Description | Component | Description |
---|---|---|---|
Multi-stage dry pump (pre-pump) RUN and STP buttons are used status: OFF mode | Gate-valve status: closed, not allowed to open | ||
Multi-stage dry pump (pre-pump) status: MAIN mode | Gate-valve status: closed, allowed to open | ||
Multi-stage dry pump (pre-pump) status: BOOSTER mode | Gate-valve status: open, allowed to open | ||
Scroll pump | Gate-valve status: open, not allowed to open | ||
Turbo pump status: OFF mode | Pressure gauge green: reading | ||
Turbo pump status: Accelerating | Pressure interlock display red: condition not met | ||
Turbo pump status: Full Speed | Cold-cathode status display circle: status display |
Tools necessary for operation
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