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Component | Description | Component | Description | Component | Description | |||
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Multi-stage dry pump (pre-pump) RUN and STP buttons are used statestatus: offOFF mode | Gate-valve statestatus: closed, not allowed to open | Pressure gauge state: reading | Scroll pump | |||||
Multi-stage dry pump (pre-pump) status: MAIN mode | Gate-valve | statestatus: closed, allowed to open | Pressure gauge state: out of range | Turbo pump state: off | ||||
Multi-stage dry pump (pre-pump) status: BOOSTER mode | Gate-valve status: open, allowed to open | |||||||
Scroll pump | Gate-valve statestatus: open, not allowed to open | |||||||
Turbo pump status: OFF mode | Pressure gauge green: reading | |||||||
Turbo pump status: Accelerating | Pressure interlock display red: condition not met | |||||||
Turbo pump | statestatus: | acceleratingFull Speed | Cold-cathode status display circle: status display |
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