Versions Compared

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.

A Residual Gas Analyzer (RGA), otherwise known as a quadrupole mass analyzer (QMS), is a small mass spectrometer that operates under vacuum to measure which elements, and how much, are flying around in a vacuum chamber. 


CHP - Quadrupole Mass SpectrometryImage Removed            EV2-120-000FT Residual Gas Analyzer



it reads out spectra like this:

...

The Y-axis represents the partial pressure that a given (molecular mass)/(molecular charge) represents within the total pressure of the chamber. 

CHP - Quadrupole Mass SpectrometryImage Added

Future sections:

ionization continued

...