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- if you're not hooking the cart up to another chamber, no prep needed.
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- if you are hooking the cart up to another chamber:
before hooking it up, do this:
1. Bring an N2 cylinder, clean regulator, and clean hose.
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Cart specifics (assumes you've done the prep listed above)
Carts 1 & 2
Cart startup procedure:
CAUTION: plugging the cart in to an electrical socket will immediately start up the roughing pump.
turn on the turbo turbo controller, bottom right:
Carts 3 & 4
These are level 3 carts. they can't make level 1 because they have some rubber seals.
valves:
Cart startup procedure:
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- open the N2 cylinder and regulator
- confirm N2 is coming out of the cart’s PRV
- close the gate valve on top of turbo
- hit Stop (also F1). This stops the turbo + roughing, and automatically vents through the turbo.
- open the small N2 valve on left side of cart, this vents N2 above the closed gate valve.
- wait for vent to complete, confirm N2 is coming out of the cart’s PRV
- close the small N2 valve on left side of cart, close the N2 cylinder
Cart 5
Carts 6 & 7
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venting/purging system
Shut down
General
Trouble Shooting:
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