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    • if you're not hooking the cart up to another chamber, no prep needed.
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    • if you are hooking the cart up to another chamber:

before hooking it up, do this: 

1. Bring an N2 cylinder, clean regulator, and clean hose.

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Cart specifics (assumes you've done the prep listed above)

Carts 1 & 2

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Cart startup procedure:

CAUTION: plugging the cart in to an electrical socket will immediately start up the roughing pump. 


turn on the turbo turbo controller, bottom right: 

Carts 3 & 4

These are level 3 carts. they can't make level 1 because they have some rubber seals. 

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valves:

Cart startup procedure:

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              1. open the N2 cylinder and regulator
              2. confirm N2 is coming out of the cart’s PRV
              3. close the gate valve on top of turbo
              4. hit Stop (also F1). This stops the turbo + roughing, and automatically vents through the turbo.
              5. open the small N2 valve on left side of cart, this vents N2 above the closed gate valve.
              6. wait for vent to complete, confirm N2 is coming out of the cart’s PRV
              7. close the small N2 valve on left side of cart, close the N2 cylinder

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Cart 5

Carts 6 & 7

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venting/purging system

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Shut down

General


Trouble Shooting:

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