Page History
...
- 2013-12-10-Quad-MEC-Metrology.xlsx- file from Gabriel Blaj
- 2013-12-10-Quad-MEC-Metrology.txt - text version of this file
- 2013-12-10-Quad-MEC-Metrology-corr.txt - text version of this corrected metrology file.
Procedure
- Use script procOpticalAlignment.py for quality check and to look at constants for center and tilt
...
Quality check summary table
Non-corrected metrology file:
| Code Block |
|---|
pair: S1 S2 dS1 dS2 L1 L2 dL1 dL2 <dS/L> angle(deg) D1 D2 dD d(dS) d(dL) dz3(um) Quad 0 pair: 0 20899 20903 -252 -248 43535 43533 117 115 -0.00574 -0.32903 48288 48295 -7 -4 2 -75.003 pair: 1 20909 20383 261 -265 43538 43555 113 130 -0.00004 -0.00256 48301 48083 218 526 -17 -16.318 pair: 2 20904 20905 -223 -224 43530 43537 -111 -104 -0.00513 -0.29416 48292 48293 -1 1 -7 -25.002 pair: 3 20901 20897 -240 -236 43525 43535 -120 -110 -0.00547 -0.31326 48287 48288 -1 -4 -10 267.024 pair: 4 20220 20893 60 733 43537 42832 685 -20 0.00925 0.52974 48298 47357 941 -673 705 -25.529 pair: 5 20907 20883 -78 -102 43534 43545 37 48 -0.00207 -0.11843 48293 48294 -1 24 -11 -223.895 pair: 6 20895 20903 20 12 43543 43537 15 9 0.00037 0.02105 48299 48292 7 8 6 52.031 pair: 7 20915 20913 -5 -3 43537 43530 -2 -9 -0.00009 -0.00526 48293 48299 -6 -2 7 11.996 |
- pair 1 – has 526um difference between short sides (S). Correction: point 4 Y: 261 -> -261
- pair 4 – has large difference in S, L, and D. Correction: point 18: Y+700: 66059 => 66759 X-700: 48012=>47312
- pairs 3 and 5 – have >200um non-flatness
Corrected metrology file:
| Code Block |
|---|
pair: S1 S2 dS1 dS2 L1 L2 dL1 dL2 <dS/L> angle(deg) D1 D2 dD d(dS) d(dL) dz3(um) Quad 0 pair: 0 20899 20903 -252 -248 43535 43533 117 115 -0.00574 -0.32903 48288 48295 -7 -4 2 -75.003 pair: 1 20909 20905 -261 -265 43538 43555 113 130 -0.00604 -0.34604 48301 48310 -9 4 -17 -14.975 pair: 2 20904 20905 -223 -224 43530 43537 -111 -104 -0.00513 -0.29416 48292 48293 -1 1 -7 -25.002 pair: 3 20901 20897 -240 -236 43525 43535 -120 -110 -0.00547 -0.31326 48287 48288 -1 -4 -10 267.024 pair: 4 20920 20893 60 33 43537 43532 -15 -20 0.00107 0.06120 48298 48289 9 27 5 -29.069 pair: 5 20907 20883 -78 -102 43534 43545 37 48 -0.00207 -0.11843 48293 48294 -1 24 -11 -223.895 pair: 6 20895 20903 20 12 43543 43537 15 9 0.00037 0.02105 48299 48292 7 8 6 52.031 pair: 7 20915 20913 -5 -3 43537 43530 -2 -9 -0.00009 -0.00526 48293 48299 -6 -2 7 11.996 |
- Corrected metrology looks much better...
Geometry parameters
center/0-end.data (pixel)
| Code Block |
|---|
199.82 198.60 311.21 98.37 628.52 629.03 715.23 503.00
199.82 198.60 311.21 98.37 628.52 629.03 715.23 503.00
199.82 198.60 311.21 98.37 628.52 629.03 715.23 503.00
199.82 198.60 311.21 98.37 628.52 629.03 715.23 503.00
306.55 93.91 623.94 625.19 512.39 724.62 197.79 197.97
306.55 93.91 623.94 625.19 512.39 724.62 197.79 197.97
306.55 93.91 623.94 625.19 512.39 724.62 197.79 197.97
306.55 93.91 623.94 625.19 512.39 724.62 197.79 197.97
-0.41 0.69 -0.64 -0.47 -1.61 -1.34 -1.52 -1.20
-0.41 0.69 -0.64 -0.47 -1.61 -1.34 -1.52 -1.20
-0.41 0.69 -0.64 -0.47 -1.61 -1.34 -1.52 -1.20
-0.41 0.69 -0.64 -0.47 -1.61 -1.34 -1.52 -1.20 |
or the same in um:
| Code Block |
|---|
21964 21829 34207 10812 69086 69143 78618 55289
21964 21829 34207 10812 69086 69143 78618 55289
21964 21829 34207 10812 69086 69143 78618 55289
21964 21829 34207 10812 69086 69143 78618 55289
33696 10323 68583 68721 56322 79650 21741 21760
33696 10323 68583 68721 56322 79650 21741 21760
33696 10323 68583 68721 56322 79650 21741 21760
33696 10323 68583 68721 56322 79650 21741 21760
-44 75 -70 -51 -177 -147 -167 -131
-44 75 -70 -51 -177 -147 -167 -131
-44 75 -70 -51 -177 -147 -167 -131
-44 75 -70 -51 -177 -147 -167 -131 |
tilt/0-end.data (degree)
| Code Block |
|---|
-0.32903 -0.34604 -0.29416 -0.31326 0.06120 -0.11843 0.02105 -0.00526
-0.32903 -0.34604 -0.29416 -0.31326 0.06120 -0.11843 0.02105 -0.00526
-0.32903 -0.34604 -0.29416 -0.31326 0.06120 -0.11843 0.02105 -0.00526
-0.32903 -0.34604 -0.29416 -0.31326 0.06120 -0.11843 0.02105 -0.00526 |
offset/0-end.data (use default)
| Code Block |
|---|
0 0 820 820
0 820 820 0
0 0 0 0 |
offset_corr/0-end.data (use default)
| Code Block |
|---|
0 0 0 0
0 0 0 0
0 0 0 0 |
marg_gap_shift/0-end.data (use default)
| Code Block |
|---|
15 40 0 22
15 40 0 22
0 0 0 0 |
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