Page History
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- 2013-12-10-Quad-MEC-Metrology.xlsx- file from Gabriel Blaj
- 2013-12-10-Quad-MEC-Metrology.txt - text version of this file
- 2013-12-10-Quad-MEC-Metrology-corr.txt - text version of this file.
Procedure
- Use script procOpticalAlignment.py for quality check and to look at constants for center and tilt
- Plots for non-corrected quad and difference between corrected and non-corrected metrology:
Quality check
Evaluated parameters
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Quality check summary table
Non-corrected metrology file:
| Code Block |
|---|
pair: S1 S2 dS1 dS2 L1 L2 dL1 dL2 <dS/L> angle(deg) D1 D2 dD d(dS) d(dL) dz3(um) Quad 0 pair: 0 20899 20903 -252 -248 43535 43533 117 115 -0.00574 -0.32903 48288 48295 -7 -4 2 -75.003 pair: 1 20909 20383 261 -265 43538 43555 113 130 -0.00004 -0.00256 48301 48083 218 526 -17 -16.318 pair: 2 20904 20905 -223 -224 43530 43537 -111 -104 -0.00513 -0.29416 48292 48293 -1 1 -7 -25.002 pair: 3 20901 20897 -240 -236 43525 43535 -120 -110 -0.00547 -0.31326 48287 48288 -1 -4 -10 267.024 pair: 4 20220 20893 60 733 43537 42832 685 -20 0.00925 0.52974 48298 47357 941 -673 705 -25.529 pair: 5 20907 20883 -78 -102 43534 43545 37 48 -0.00207 -0.11843 48293 48294 -1 24 -11 -223.895 pair: 6 20895 20903 20 12 43543 43537 15 9 0.00037 0.02105 48299 48292 7 8 6 52.031 pair: 7 20915 20913 -5 -3 43537 43530 -2 -9 -0.00009 -0.00526 48293 48299 -6 -2 7 11.996 |
- pair 1 – has 526um difference between short sides (S). Correction: point 4 Y: 261 -> -261
- pair 4 – has large difference in S, L, and D. Correction: point 18: Y+700: 66059 => 66759 X-700: 48012=>47312
- pairs 3 and 5 – have >200um non-flatness
| Code Block |
|---|
pair: S1 S2 dS1 dS2 L1 L2 dL1 dL2 <dS/L> angle(deg) D1 D2 dD d(dS) d(dL) dz3(um)
Quad 0
pair: 0 20899 20903 -252 -248 43535 43533 117 115 -0.00574 -0.32903 48288 48295 -7 -4 2 -75.003
pair: 1 20909 20905 -261 -265 43538 43555 113 130 -0.00604 -0.34604 48301 48310 -9 4 -17 -14.975
pair: 2 20904 20905 -223 -224 43530 43537 -111 -104 -0.00513 -0.29416 48292 48293 -1 1 -7 -25.002
pair: 3 20901 20897 -240 -236 43525 43535 -120 -110 -0.00547 -0.31326 48287 48288 -1 -4 -10 267.024
pair: 4 20920 20893 60 33 43537 43532 -15 -20 0.00107 0.06120 48298 48289 9 27 5 -29.069
pair: 5 20907 20883 -78 -102 43534 43545 37 48 -0.00207 -0.11843 48293 48294 -1 24 -11 -223.895
pair: 6 20895 20903 20 12 43543 43537 15 9 0.00037 0.02105 48299 48292 7 8 6 52.031
pair: 7 20915 20913 -5 -3 43537 43530 -2 -9 -0.00009 -0.00526 48293 48299 -6 -2 7 11.996 |
- Corrected metrology looks much better...
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