Content
Metrology
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table
Metrology-140ks-Feb13-2013.xlsx
Optical measurements
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Quality check and alignment parameters
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pair: S1 S2 dS1 dS2 L1 L2 dL1 dL2 <dS/L> angle(deg) D1 D2 dD d(dS) d(dL)
pair: 0 20909 20902 2 -5 43538 43539 0 1 -0.00006 -0.00329 48297 48297 0 7 -1
pair: 1 20906 20902 2 -2 43538 43538 0 0 0.00000 0.00000 48296 48296 0 4 0
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center/0-end.data
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198.05 198.42
95.10 307.54
0.09 0.03
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tilt/0-end.data
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-0.00329 0.00000
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pair: S1 S2 dS1 dS2 L1 L2 dL1 dL2 <dS/L> angle(deg) D1 D2 dD d(dS) d(dL)
pair: 0 20905 20896 5 -4 43536 43536 -2 -2 0.00001 0.00066 48291 48294 -3 9 0
pair: 1 20905 20905 -22 -22 43540 43536 10 6 -0.00051 -0.02895 48294 48299 -5 0 4
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center/0-end.data
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198.03 198.94
95.09 306.84
0.18 0.21
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tilt/0-end.data
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0.00066 -0.02895
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pair: S1 S2 dS1 dS2 L1 L2 dL1 dL2 <dS/L> angle(deg) D1 D2 dD d(dS) d(dL)
pair: 0 20907 20908 -5 -4 43540 43545 0 5 -0.00005 -0.00263 48302 48301 1 -1 -5
pair: 1 20904 20907 421 424 43538 43538 -203 -203 0.00970 0.55601 48299 48299 0 -3 0
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center/0-end.data
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198.06 196.67
95.08 308.15
0.17 0.23
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tilt/0-end.data
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-0.00263 0.55601
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pair: S1 S2 dS1 dS2 L1 L2 dL1 dL2 <dS/L> angle(deg) D1 D2 dD d(dS) d(dL)
pair: 0 20906 20905 -8 -9 43540 43540 3 3 -0.00020 -0.01119 48297 48299 -2 1 0
pair: 1 20908 20898 -12 -22 43541 43538 12 9 -0.00039 -0.02237 48299 48295 4 10 3
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center/0-end.data
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198.07 198.70
95.06 307.79
0.24 0.30
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tilt/0-end.data
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-0.01119 -0.02237
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pair: S1 S2 dS1 dS2 L1 L2 dL1 dL2 <dS/L> angle(deg) D1 D2 dD d(dS) d(dL)
pair: 0 20904 20904 2 2 43536 43536 -1 -1 0.00005 0.00263 48294 48294 0 0 0
pair: 1 20908 20909 122 123 43540 43545 -61 -56 0.00281 0.16119 48302 48302 0 -1 -5
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center/0-end.data
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198.03 197.12
95.10 307.60
0.03 -0.11
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tilt/0-end.data
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0.00263 0.16119
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pair: S1 S2 dS1 dS2 L1 L2 dL1 dL2 <dS/L> angle(deg) D1 D2 dD d(dS) d(dL)
pair: 0 20903 20900 59 56 43541 43539 -27 -29 0.00132 0.07567 48296 48297 -1 3 2
pair: 1 20979 20977 49 47 43707 43705 -20 -22 0.00110 0.06292 48481 48477 4 2 2
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center/0-end.data
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197.93 196.92
95.34 307.53
-1.60 -3.63
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tilt/0-end.data
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0.07567 0.06292
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References