Page History
...
Comparing deviations of dS1 and dS2, and dL1 and dL2, we found:
- In Quad 1, pair: 3 mis-measured x and y about 200um - Use it as is.
- In Quad 3, pair: 3 5 mis-measured x and y about 200um - Use it as is (do not know which corner(s) should be corrected).
- All other measurements are consistent within +/-10um
- Angles of 2x1 are in the range from -0.64 to +0.38 degree.
...
Overview
Content Tools