We have checked monitor pattern and estimated the value of poly-Si resistors below.
	SWA62600	Min. 0.69Mohm	Max. 0.75Mohm	Ave. 0.72Mohm	Dev. 0.01
	SWA62605	Min. 0.69Mohm	Max. 0.76Mohm	Ave. 0.72Mohm	Dev. 0.01
	SWA62606	Min. 0.65Mohm	Max. 0.74Mohm	Ave. 0.70Mohm	Dev. 0.01	
	SWA62703	Min. 0.66Mohm	Max. 0.73Mohm	Ave. 0.69Mohm	Dev. 0.01
	SWA62704	Min. 0.67Mohm	Max. 0.74Mohm	Ave. 0.71Mohm	Dev. 0.01

We have checked the implant resistance on the monitor pattern.
	SWA62600	Ave. 1.75Mohm
	SWA62605	Ave. 1.79Mohm
	SWA62606	Ave. 1.82Mohm
	SWA62703	Ave. 1.86Mohm
	SWA62704	Ave. 1.82Mohm

We have checked the ACAL resistance on the monitor pattern.
	SWA62600	Ave. 174.5ohm
	SWA62605	Ave. 165.5ohm
	SWA62606	Ave. 154.7ohm
	SWA62703	Ave. 166.5ohm
	SWA62704	Ave. 174.8ohm

We have checked the coupling capacitance on the monitor pattern.
	SWA62600	Ave. 140.9pF
	SWA62605	Ave. 140.8pF
	SWA62606	Ave. 142.5pF
	SWA62703	Ave. 138.3pF
	SWA62704	Ave. 142.3pF

We have checked the break down voltage of capacitor on the monitor pattern.
	SWA62600	Ave. 180V
	SWA62605	Ave. 180V
	SWA62606	Ave. 180V
	SWA62703	Ave. 180V
	SWA62704	Ave. 180V