We have checked monitor pattern and estimated the value of poly-Si resistors below.	
	SWA62571	Min. 0.70Mohm	Max. 0.78Mohm	Ave. 0.73Mohm	Dev. 0.01
	SWA62572	Min. 0.71Mohm	Max. 0.80Mohm	Ave. 0.76Mohm	Dev. 0.02

We have checked the implant resistance on the monitor pattern.	
	SWA62571	Ave. 1.87Mohm
	SWA62572	Ave. 1.88Mohm

We have checked the ACAL resistance on the monitor pattern.	
	SWA62571	Ave. 159.2ohm
	SWA62572	Ave. 152.6ohm

We have checked the coupling capacitance on the monitor pattern.	
	SWA62571	Ave. 140.2pF
	SWA62572	Ave. 141.7pF

We have checked the break down voltage of capacitor on the monitor pattern.	
	SWA62571	Ave. 180V
	SWA62572	Ave. 180V